Flexible display and manufacturing method of the same

ABSTRACT

A flexible display of the present invention is an active matrix flexible display in which a TFT is provided for each pixel. In the flexible display, an adhesive layer, a protective layer, a gate electrode for the TFT, which is buried in the protective layer, a gate insulating layer for the TFT, source and drain electrodes for the TFT, a pixel electrode electrically connected to the drain electrode, an organic active layer for the TFT, an organic EL layer including a red (R) emitting layer, a green (G) emitting layer and a blue (B) emitting layer, which are formed on a plurality of the pixel electrodes, a metal electrode, and a sealing layer are formed on a plastic film.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a flexible display and a manufacturingmethod thereof. More particularly, the present invention relates to aflexible display applicable to an organic EL display, a liquid crystaldisplay and the like which use a plastic film as a substrate, and amanufacturing method thereof.

2. Description of the Related Art

There has been a rapid increase in applications of a display device,such as an organic EL (electroluminescence) display and a liquid crystaldisplay, to information device and the like. A flexible display using aplastic film as a substrate has recently attracted attention. Such aflexible display can be utilized not only for an ultraslim and lightmobile device which can be housed while being rolled up and is easilycarried around but also for a large-sized display.

However, since the plastic film has low rigidity and a low heatdistortion temperature, heat distortion such as warping andexpansion/contraction is likely to occur in manufacturing stepsinvolving heat treatment. Thus, in a manufacturing method by whichvarious elements are formed directly on the plastic film, conditions ofthe manufacturing steps involving heat treatment are limited, and itbecomes difficult to perform high-accuracy alignment. Consequently, itmay be impossible to manufacture an element substrate having desiredcharacteristics.

In order to avoid the problem as described above, there is a method ofmanufacturing an element substrate for a liquid crystal device in thefollowing manner (Patent Document 1 Japanese Patent Laid-Open OfficialGazette No. 2003-131199)). Specifically, without having manufacturingconditions limited, a transparent electrode, a color filter layer andthe like are formed on a heat-resistant and rigid glass substrate whilebeing aligned with high accuracy. Thus, a transfer layer is formed.Thereafter, the transfer layer is transferred and formed on a plasticfilm.

Moreover, in order to obtain a display having excellent displaycharacteristics, active drive including a drive transistor for eachpixel is required. A flexible display requires flexible TFT elementswhich can follow bending. A low-temperature polysilicon TFT or anamorphous silicon TFT as a conventional drive transistor may not obtainsufficient reliability. Thus, as a drive transistor of the flexibledisplay, an organic TFT using a flexible organic semiconductor layer,which can follow bending, as an active layer has attracted attention.

Patent Document 2 (Japanese Patent Laid-Open Official Gazette No.2003-255857) describes a method of manufacturing an organic EL displayin the following manner. Specifically, a gate electrode, a gateinsulating film, an organic semiconductor layer and source and drainelectrodes are sequentially formed on a substrate. Thereafter, anorganic EL element is formed on an anode connected to the drainelectrode.

Moreover, Patent Document 3 (Japanese Patent Laid-Open Official GazetteNo. 2003-318195) describes a method of transferring an organic TFT,which is formed of a gate electrode, a gate insulating film, an organicsemiconductor layer and source and drain, from a heat-resistantsubstrate to a surface substrate (a plastic substrate) after aseparating layer is formed on the heat-resistant substrate and theorganic TFT is formed thereon.

Meanwhile, as to an organic semiconductor layer and an organic EL layer,there is a problem that performance thereof is deteriorated byphotolithography and etching steps, which involve an organic solvent,water, plasma, an electron beam, heat treatment or the like, andtherefore the layers hardly function.

In Patent Documents 2 and 3 described above, it is required to patternthe source and drain and the like after the organic semiconductor layeris formed. Thus, deterioration in performance of the organicsemiconductor layer in the photolithography step may become a problem.

As described above, a method of manufacturing a flexible display whichuses a plastic film as a substrate and includes organic TFTs has notbeen sufficiently established. Therefore, there has been demanded amethod of stably forming, with high yield, desired organic TFTs ororganic EL elements on the plastic film.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a flexible displaywhich uses a plastic film as a substrate and includes organic TFTs, anda manufacturing method thereof. Specifically, the flexible display ismanufactured with high yield without causing any trouble.

The present invention relates to a flexible display and is an activematrix flexible display in which a TFT is provided for each pixel. Theflexible display includes: a plastic film; an adhesive layer formed onthe plastic film; a protective layer formed on the adhesive layer; agate electrode for the TFT, which is buried in the protective layer; agate insulating layer for the TFT, which covers the gate electrode;source and drain electrodes for the TFT, which are formed on the gateinsulating layer and disposed at predetermined intervals on the gateelectrode; a pixel electrode which is formed on the gate insulatinglayer and is electrically connected to the drain 2 electrode; an organicactive layer for the TFT, which is formed on a space between the sourceand drain electrodes and is electrically connected to the source anddrain electrodes; an organic EL layer including an emitting layer formedon the pixel electrode of each pixel; a metal electrode formed on theorganic EL layer; and a sealing layer which covers the metal electrode.

In order to obtain the flexible display of the present invention, first,a transfer layer is formed on a heat-resistant and rigid temporarysubstrate (a glass substrate and the like) so as to have desired filmcharacteristics without having manufacturing conditions limited, thetransfer layer being formed of a peelable layer, source and drainelectrodes, a pixel electrode, a gate insulating layer, a gate electrodeand a protective layer. Thereafter, the transfer layer is transferredand formed in a state of being inverted upside down on a plastic filmwith an adhesive layer interposed therebetween. Next, after the peelablelayer is removed, an organic active layer electrically connected to thesource and drain electrodes exposed to the upper side is formed on aspace between the source and drain electrodes by use of mask vapordeposition, an ink jet method and the like.

Subsequently, an organic EL layer including an emitting layer is formedon a pixel electrode of each pixel by use of the mask vapor deposition,the ink jet method and the like. Furthermore, after a metal electrode isformed on the organic EL layer, the metal electrode is covered with asealing layer.

In the present invention described above, the emitting layer may beformed of a red (R) emitting layer, a green (G) emitting layer and ablue (B) emitting layer. Alternatively, by using a white emitting layeras the emitting layer, a color filter layer buried in the adhesive layermay be formed between the adhesive layer and the protective layer.Alternatively, in the case of improving color saturation, a full-colordisplay may be realized in such a manner that the emitting layer isformed of emitting layers of three primary colors, a color filter layeris formed between the adhesive layer and the protective layer, and thecolor filter layer is combined with electroluminescence of the threeprimary colors.

Unlike the present invention, in a structure in which a TFT including anorganic active layer, a pixel electrode and an organic EL layer areformed directly on a plastic film, a photolithography step is requiredafter the organic active layer is formed. Thus, performance of theorganic active layer is deteriorated. Moreover, in the case where alow-resistance pixel electrode (ITO) is formed, high-temperature heattreatment is involved. Thus, there is a problem that the plastic film isthermally deformed.

However, in the present invention, a patterning step by photolithographywhich adversely affects the organic active layer and the organic ELlayer (a step of forming the source electrode, the drain electrode, thepixel electrode and the gate electrode) and a step involvinghigh-temperature heat treatment (a step of forming the pixel electrodeand the like) are performed on the temporary substrate. After thoseelectrodes are transferred onto the plastic film, the organic activelayer and the organic EL layer are formed by use of the mask vapordeposition, the ink jet method and the like. Thus, there is no longer arisk that performance of the organic active layer and the organic ELlayer is deteriorated by various processing in the photolithographystep.

As described above, in the flexible display of the present invention,the organic active layer and the organic EL layer for the TFT areformed, with high yield, on the plastic film without causing anytrouble. Thus, manufacturing costs can be reduced and reliability can beimproved.

The flexible display of the present invention can also be applied to anactive matrix liquid crystal display by omitting the organic EL layerand the like.

Moreover, the present invention relates to a method of manufacturing aflexible display and is a method of manufacturing an active matrixflexible display in which a TFT is provided for each pixel. The methodincludes the steps of: forming a peelable layer on a temporarysubstrate; forming source and drain electrodes for the TFT on thepeelable layer, and forming a pixel electrode electrically connected tothe drain electrode; forming a gate insulating layer for the TFT, whichcovers the source electrode, the drain electrode and the pixelelectrode; forming a gate electrode for the TFT in a portion on the gateinsulating layer on a space between the source and drain electrodes;forming a protective layer which covers the gate electrode; attaching aplastic film to the protective layer with an adhesive layer interposedtherebetween; removing the temporary substrate from an interface withthe peelable layer, and transferring onto the plastic film the peelablelayer, the source electrode, the drain electrode, the pixel electrode,the gate insulating layer, the gate electrode and the protective layer;exposing upper surfaces of the source electrode, the drain electrode andthe pixel electrode by removing the peelable layer; forming an organicactive layer for the TFT, which is electrically connected to the sourceand drain electrodes, on the space between the source and drainelectrodes; forming an organic EL layer including an emitting layer onthe pixel electrode of each pixel before or after the organic activelayer is formed; forming a metal electrode on the organic EL layer; andforming a sealing layer which covers the metal electrode.

By use of the manufacturing method of the present invention, theflexible display having the configuration described above can be easilymanufactured.

In the present invention described above, the organic active layer andthe organic EL layer for the TFT are formed by use of mask vapordeposition, an ink jet method or printing. In the case where the ink jetmethod or printing is adopted, before the organic active layer and theorganic EL layer are formed, an organic insulating layer pattern isformed, which has openings provided on the space between the source anddrain electrodes and on the pixel electrode. Thereafter, in a statewhere the organic insulating layer pattern is set to be a barrier, theorganic active layer and the organic EL layer are formed while beingaligned in the openings, respectively.

Moreover, the present invention relates to a flexible display and is anactive matrix flexible display in which a TFT is provided for eachpixel. The flexible display includes: a plastic film; an adhesive layerformed on the plastic film; a barrier insulating layer formed on theadhesive layer; a TFT which is formed on or above the barrier insulatinglayer and has a structure in which an organic active layer, a gateinsulating layer and a gate electrode are formed sequentially from thebottom and source and drain electrodes are electrically connected to theorganic active layer; a pixel electrode which is formed above thebarrier insulating layer and is electrically connected to the drainelectrode of the TFT; an organic EL layer including an emitting layerformed on the pixel electrode of each pixel; a metal electrode formed onthe organic EL layer; and a sealing layer which covers the metalelectrode.

The flexible display of the present invention is manufactured by use ofa transfer technology. First, a transfer layer is formed on aheat-resistant and rigid temporary substrate (a glass substrate and thelike) so as to have desired film characteristics without havingmanufacturing conditions limited. Specifically, the transfer layerincludes a TFT, which is formed so as to have a peelable layer and anorganic active layer on the top, a pixel electrode connected to a drainelectrode of the TFT, and a barrier insulating layer. Thereafter, thetransfer layer is transferred and formed in a state of being invertedupside down on a plastic film with an adhesive layer interposedtherebetween. Subsequently, after the peelable layer is removed, anorganic EL layer including an emitting layer is formed on the pixelelectrode of each pixel. Furthermore, after a metal electrode is formedon the organic EL layer, the metal electrode is covered with a sealinglayer.

In the present invention, a patterning step by photolithography whichadversely affects the organic active layer and the organic EL layer (astep of forming the gate electrode, the source electrode and the drainelectrode of the TFT and the pixel electrode) is performed on thetemporary substrate before the organic active layer and the organic ELlayer are formed. Furthermore, after the organic active layer connectedto the source and drain electrodes is formed on the temporary substrateby use of mask vapor deposition and the like, the barrier insulatinglayer is formed to obtain the transfer layer. Thereafter, after thetransfer layer is transferred in a state of being inverted upside downon the plastic film, the organic EL layer is formed on the pixelelectrode exposed to the top by use of the mask vapor deposition and thelike. By adopting the manufacturing method as described above, there isno longer a risk that characteristics of the organic active layer andthe organic EL layer are deteriorated by various processing in thephotolithography step.

In the flexible display of the present invention, as in the case of theinvention described above, the organic active layer and the organic ELlayer for the TFT are formed, with high yield, on the plastic filmwithout causing any trouble. Thus, manufacturing costs can be reducedand reliability can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1M are cross-sectional views showing a method ofmanufacturing a flexible display according to a first embodiment of thepresent invention.

FIG. 2 is a cross-sectional view showing a flexible display (an organicEL display) of the first embodiment.

FIG. 3 is a view showing an equivalent circuit in one pixel part of theflexible display according to the first embodiment of the presentinvention.

FIG. 4 is a plan view of one pixel part of the flexible displayaccording to the first embodiment of the present invention.

FIG. 5 is a cross-sectional view showing a flexible display (an organicEL display) according to a second embodiment of the present invention.

FIGS. 6A to 6K are cross-sectional views showing a method ofmanufacturing a flexible display according to a third embodiment of thepresent invention.

FIGS. 7A to 7H are cross-sectional views showing a method ofmanufacturing a flexible display according to a fourth embodiment of thepresent invention.

FIG. 8 is a cross-sectional view showing a flexible display (a liquidcrystal display) according to the fourth embodiment of the presentinvention.

FIGS. 9A to 9O are cross-sectional views showing a method ofmanufacturing a flexible display according to a fifth embodiment of thepresent invention.

FIG. 10 is a cross-sectional view showing a flexible display (an organicEL display) according to the fifth embodiment of the present invention.

FIG. 11 is a cross-sectional view showing a flexible display (an organicEL display) according to a sixth embodiment of the present invention.

FIGS. 12A to 12L are cross-sectional views showing a method ofmanufacturing a flexible display according to a seventh embodiment ofthe present invention.

FIG. 13 is a cross-sectional view showing a flexible display (an organicEL display) according to the seventh embodiment of the presentinvention.

FIGS. 14A to 14J are cross-sectional views showing a method ofmanufacturing a flexible display according to an eighth embodiment ofthe present invention.

FIG. 15 is a cross-sectional view showing a flexible display accordingto the eighth embodiment of the present invention.

FIGS. 16A to 16K are cross-sectional views showing a method ofmanufacturing a flexible display according to a ninth embodiment of thepresent invention.

FIG. 17 is a cross-sectional view showing a flexible display (a liquidcrystal display) according to the ninth embodiment of the presentinvention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

With reference to the accompanying drawings, embodiments of the presentinvention will be described below.

First Embodiment

FIGS. 1A to 1M are cross-sectional views sequentially showing a methodof manufacturing a flexible display according to a first embodiment ofthe present invention. FIG. 2 is a cross-sectional view showing aflexible display (an organic EL display) according to the firstembodiment of the present invention. In the first embodiment,description will be given by taking the case of applying the presentinvention to the organic EL display as an example. In the method ofmanufacturing a flexible display according to the first embodiment ofthe present invention, as shown in FIG. 1A, first, a glass substrate 20as a temporary substrate is prepared, and a peelable layer 22 made of apolyimide resin and the like is formed on the glass substrate 20.

Thereafter, as shown in FIG. 1B, a conductive layer made of gold (Au)having a thickness of, for example, 100 nm or the like is formed on thepeelable layer 22. Subsequently, the conductive layer is patterned byphotolithography and etching. Thus, a source electrode 24 a and a drainelectrode 24 b of a switching TFT (thin film transistor) (hereinafterreferred to as a Sw-TFT) and a source electrode 24 x and a drainelectrode 24 y of a driving TFT (hereinafter referred to as a Dr-TFT)are formed.

Subsequently, by use of a sputtering method, a transparent conductivelayer such as an ITO (indium tin oxide) layer having a thickness of, forexample, 150 nm is formed on the peelable layer 22, the sourceelectrodes 24 a and 24 x and the drain electrodes 24 b and 24 y.Thereafter, the transparent conductive layer is patterned byphotolithography and etching. Thus, as shown in FIG. 1C, a pixelelectrode 26 electrically connected to the drain electrode 24 y for theDr-TFT is formed on the peelable layer 22. Note that the pixel electrode26 may be formed so as to overlap with an end of the drain electrode 24y for the Dr-TFT. In this embodiment, the ITO layer to be the pixelelectrode 26 is formed above the heat-resistant glass substrate 20.Thus, it is possible to adopt a sputtering method using a depositiontemperature of about 200 {hacek over (Z)}, and the like. Thus, the pixelelectrode 26 (ITO) is formed so as to have low-resistance (a specificresistance value: 3×10⁻⁴Ω 'cm or less) electrical characteristics.

Next, as shown in FIG. 1D, gate insulating layer 28 is formed, gateinsulating layer covering the source electrodes 24 a and 24 x, the drainelectrodes 24 b and 24 y and the pixel electrode 26. As the gateinsulating layer 28, a silicon oxide layer (SiO_(x) layer) or a tantalumoxide layer (Ta₂O₅ layer) which has a thickness of, for example, 200 nmis used. The insulating layer described above is formed by use of CVD, asputtering method or the like.

Thereafter, a conductive layer made of tantalum (Ta), aluminum (Al), ITOor the like is formed on the gate insulating layer 28 by use of vapordeposition, the sputtering method or the like. Subsequently, theconductive layer is patterned by photolithography and etching.

Thus, as shown in FIG. 1E, a gate electrode 30 a for the Sw-TFT isformed on the gate insulating layer 28 in a portion above a spacebetween the source and drain electrodes 24 a and 24 b for the Sw-TFT soas to overlap above ends thereof, respectively. Moreover, at the sametime, a gate electrode 30 b for the Dr-TFT is formed on the gateinsulating layer 28 in a portion above a space between the source anddrain electrodes 24 x and 24 y for the Dr-TFT so as to overlap aboveends thereof, respectively.

Accordingly, on the glass substrate 20, the source electrodes 24 a and24 x, the drain electrodes 24 b and 24 y, the pixel electrode 26, andthe gate electrodes 30 a and 30 b are formed while being miniaturizedwith high accuracy in a desired pattern by photolithography.

Subsequently, as shown in FIG. 1F, protective layer 32 is formed, theprotective layer covering the respective gate electrodes 30 a and 30 band is made of an acrylic resin and the like. Thus, steps of the gateelectrodes 30 a and 30 b are covered with the protective layer 32 andflattened.

Next, as shown in FIG. 1G, a plastic film 40 is disposed on an uppersurface of the structure shown in FIG. 1F with an adhesive layer 34interposed therebetween. Furthermore, the adhesive layer 34 is hardenedby heat treatment to attach the plastic film 40 to the structure shownin FIG. 1F. As the plastic film 40, a polyethersulfone film, apolycarbonate film or the like, which has a thickness of 100 to 200 fÊm,is preferably used.

Subsequently, as also shown in FIG. 1G, a roll 29 is fixed to one end ofthe plastic film 40, and the glass substrate 20 is peeled while the roll29 is being rotated. In this event, the glass substrate 20 is peeledalong an interface (the portion A in FIG. 1G) between the glasssubstrate 20 and the peelable layer 22, and is discarded.

Thus, as shown in FIG. 1H, on the plastic film 40, the adhesive layer34, the protective layer 32, the gate electrodes 30 a and 30 b, the gateinsulating layer 28, the source electrodes 24 a and 24 x, the drainelectrodes 24 b and 24 y and the pixel electrode 26, and the peelablelayer 22 are transferred and formed sequentially from the bottom.

Thereafter, as shown in FIG. n, the peelable layer 22 is removed by useof oxygen gas plasma. Thus, upper surfaces of the source electrodes 24 aand 24 x, the drain electrodes 24 b and 24 y, and the pixel electrode 26are exposed.

Next, as shown in FIG. 1I, an organic active layer 36 a for the Sw-TFTis formed on the gate insulating layer 28 in a portion on the spacebetween the source and drain electrodes 24 a and 24 b for the Sw-TFT soas to overlap with the ends thereof, respectively. In this event,simultaneously, an organic active layer 36 b for the Dr-TFT is formed onthe gate insulating layer 28 in a portion on the space between thesource and drain electrodes 24 x and 24 y for the Dr-TFT so as tooverlap with the ends thereof, respectively. As a material for each ofthe organic active layers 36 a and 36 b, an organic semiconductor suchas pentacene, sexithiophene and polythiophene is used. The organicactive layers 36 a and 36 b are formed by mask vapor deposition, each ofwhich has a thickness of, for example, 50 nm. The mask vapor depositionis a method of forming a pattern simultaneously with deposition bymoving a shadow mask with high accuracy in a vacuum evaporator.Therefore, without using photolithography, the patterned organic activelayers 36 a and 36 b can be formed. Thus, there is no risk thatperformance of the organic active layers 36 a and 36 b is deterioratedby wet processing, plasma and the like in the photolithography step.

Accordingly, a Sw-TFT 5 is obtained, the Sw-TFT including the gateelectrode 30 a, the gate insulating layer 28, the source electrode 24 a,the drain electrode 24 b and the organic active layer 36 a. Moreover, atthe same time, a Dr-TFT 6 is obtained, the Dr-TFT including the gateelectrode 30 b, the gate insulating layer 28, the source electrode 24 x,the drain electrode 24 y and the organic active layer 36 b.

As described above, in this embodiment, without having manufacturingconditions limited, the source electrodes 24 a and 24 x, the drainelectrodes 24 b and 24 y, the pixel electrode 26, and the gateelectrodes 30 a and 30 b, all of which have desired filmcharacteristics, are patterned and formed with high accuracy on the heatresistant glass substrate 20 by photolithography. Subsequently, afterthe electrodes described above are transferred onto the plastic film 40,the organic active layers 36 a and 36 b are formed. Therefore, there isno longer a risk that the performance of the organic active layers 36 aand 36 b is deteriorated in the photolithography step for forming thepixel electrode 26 and the like.

Subsequently, as shown in FIG. 1K, a hole transport layer 38 having athickness of, for example, 30 nm is selectively formed on the pixelelectrode 26 by mask vapor deposition. As the hole transport layer 38, F

-NPD that is an aromatic tertiary amine derivative or the like issuitably used.

Furthermore, as also shown in FIG. 1K, a low-molecular-weight emittinglayer 42 having a thickness of, for example, 70 nm is selectively formedon the hole transport layer 38 by mask vapor deposition. In thisembodiment, description is given of the case where a full-color displayis realized by separately forming emitting layers of three primarycolors, as an example. Thus, as described later with reference to FIG.2, a red emitting layer, a green emitting layer and a blue emittinglayer are formed, respectively, on the hole transport layer 38 inrespective pixel parts of three primary colors (red (R), green (G) andblue (B)) The pixel parts (subpixels) of the three primary colors form apixel that is a display unit.

As the low-molecular-weight emitting layer 42, one obtained by mixing adoping material with a host material is used. The doping material(molecules) emits light. As the host material, there are, for example,Alq3 and a distyryl arylene derivative (DPVBi). As the doping material,there are, for example, coumarin 6 which emits green light, DCJTB whichemits red light, and the like.

Subsequently, as also shown in FIG. 1K, an electron transport layer 44is formed on the emitting layer 42 by mask vapor deposition. As theelectron transport layer 44, a quinolinol aluminum complex (Alq3) or thelike is suitably used.

Thus, an organic EL layer 3 is obtained, the organic EL layer includingthe hole transport layer 38, the emitting layer 42 and the electrontransport layer 44.

Note that only one of the hole transport layer 38 and the electrontransport layer 44 may be formed or both of the hole transport layer 38and the electron transport layer 44 may be omitted.

Moreover, the organic EL layer 3 may be first formed after the peelablelayer 22 is removed (FIG. 1I), and, thereafter, the organic activelayers 36 a and 36 b for the TFT may be formed.

Furthermore, as shown in FIG. 1L, a metal electrode 46 is selectivelyformed on the electron transport layer 44 by mask vapor deposition. Asthe metal electrode 46, a lithium fluoride/aluminum (LiF/Al) laminatedfilm or the like is suitably used. A thickness of a LiF layer is set to0.2 to 1 nm, and a thickness of an Allayer is set to 100 to 200 nm.

Note that, in the case where the respective organic active layers 36 aand 36 b are selectively covered with an insulating layer by mask vapordeposition, printing or the like, the metal electrode 46 may be formedon the entire upper surface of the structure shown in FIG. 1K.

Thus, an organic EL element 2 is obtained, the organic EL elementincluding the pixel electrode 26, the organic EL layer 3 and the metalelectrode 46.

As described above, in this embodiment, photolithography is not used inthe step of forming the organic active layers 36 a and 36 b and theorganic EL layer 3 and the subsequent steps. Thus, there is no longer arisk that performance of the organic active layers 36 a and 36 b and theorganic EL layer 3 is deteriorated by various processing in thephotolithography step.

Thereafter, as shown in FIG. 1M, a sealing layer 48 is formed, whichcovers the organic EL element 2, the Sw-TFT 5 and the Dr-TFT 6. As thesealing layer 48, a silicon oxide layer (SiOx), a silicon nitride layer(SiNx) or the like is used. The sealing layer 48 is formed bylow-temperature CVD at a deposition temperature of about 100 {hacek over(Z)}, for example. Alternatively, the sealing layer 48 may be formed byattaching a resin film having a moisture' proof layer formed therein.

Accordingly, a flexible organic EL display 1 according to the firstembodiment of the present invention is completed.

As described above, in the method of manufacturing a flexible displayaccording to the first embodiment, first, a transfer layer is formedwith high accuracy on the heat-resistant glass substrate 20 withouthaving manufacturing conditions limited. Specifically, the transferlayer includes the peelable layer 22, the source electrodes 24 a and 24x, the drain electrodes 24 b and 24 y, the pixel electrode 26, the gateinsulating layer 28, the gate electrodes 30 a and 30 b, and theprotective layer 32. Thereafter, the transfer layer is transferred andformed in a state of being inverted upside down on the plastic film 40with the adhesive layer 34 interposed therebetween. Next, after thepeelable layer 22 is removed, the organic active layers 36 a and 36 bfor the TFTs are formed by the mask vapor deposition on the spacesbetween the source electrodes 24 a and 24 x and the drain electrodes 24b and 24 y.

Furthermore, the hole transport layer 38, the three-primary-coloremitting layer 42 and the electron transport layer 44 are sequentiallyformed on the pixel electrode 26 by the mask vapor deposition to obtainthe organic EL layer 3. Subsequently, after the metal electrode 46 isformed on the organic EL layer 3, the metal electrode 46 and the organicEL layer 3 are covered with the sealing layer 48.

In this embodiment, a patterning step (the step of forming the sourceelectrodes 24 a and 24 x, the drain electrodes 24 b and 24 y, the pixelelectrode 26, and the gate electrodes 30 a and 30 b) by photolithographywhich adversely affects the organic active layers 36 a and 36 b and theemitting layer 42 is performed on the glass substrate 20. Subsequently,after the electrodes described above are transferred onto the plasticfilm 40, the organic active layers 36 a and 36 b and the emitting layer42 are formed by the mask vapor deposition. Therefore, there is nolonger a risk that the characteristics of the organic active layers 36 aand 36 b and the emitting layer 42 are deteriorated by variousprocessing in the photolithography step.

As described above, in this embodiment, it is made possible to stablymanufacture, with high yield, an organic EL display which uses a plasticfilm as a substrate and includes organic TFTs.

FIG. 2 shows pixel parts of three primary colors (a red pixel part (R),a green pixel part (G) and a blue pixel part (B)) in the flexibledisplay of the first embodiment. As shown in FIG. 2, in the flexibleorganic EL display 1 of the first embodiment, the plastic film 40 isused as a substrate, and the protective film 32 is formed thereon withthe adhesive layer 34 interposed therebetween. In the protective film 32in the respective pixel parts (R), (G) and (B) of the three primarycolors, the gate electrodes 30 a of the Sw-TFTs 5 and the gateelectrodes 30 b of the Dr-TFTs 6 are buried, respectively. On therespective gate electrodes 30 a and 30 b, the gate insulating layer 28is formed.

Furthermore, on the gate insulating layer 28 in the respective pixelparts (R), (G) and (B) of the three primary colors, the source and drainelectrodes 24 a and 24 b for the SW-TFTs 5, the source and drainelectrodes 24 x and 24 y for the Dr-TFTs 6, and, the pixel electrodes 26electrically connected to the drain electrodes 24 y for the Dr-TFTs 6are formed, respectively.

Moreover, on the respective pixel electrodes 26 in the respective pixelparts (R), (G) and (B) of the three primary colors, the organic ELlayers 3 formed of the hole transport layers 38, emitting layers 42R,42G and 42B, and the electron transport layers 44 are formed,respectively. The red emitting layer 42R, the green emitting layer 42Gand the blue emitting layer 42B are provided so as to correspond to therespective pixel parts (R), (G) and (B) of the three primary colors.

Furthermore, the metal electrodes 46 are formed, respectively, on theorganic EL layers S in the respective pixel parts (R), (G) and (B) ofthe three primary colors. In the respective pixel parts (R), (G) and(B), the organic EL elements 2 formed of the pixel electrodes 26, theorganic EL layers S and the metal electrodes 46 are provided,respectively. On the organic EL elements 2, the Dr-TFTs 6 and theSw-TFTs 5, the sealing layer 48 which covers the elements and the TFTsis formed.

FIG. 3 is a view showing an equivalent circuit in one pixel part of theflexible display according to the first embodiment of the presentinvention. FIG. 4 is a plan view of one pixel part of the flexibledisplay according to the first embodiment of the present invention.

As shown in FIGS. 3 and 4, in the flexible organic EL display 1 of thefirst embodiment, the metal electrode 46 (cathode) of the organic ELelement 2 is connected to a ground (GND) 66, and the pixel electrode 26(anode) of the organic EL element 2 is connected to the drain electrode24 y of the Dr-TFT 6 The source electrode 24 x of the Dr-TFT 6 isconnected to a power supply (Vdd) line 60. In addition, a retentioncapacity Cs is formed between the gate electrode 30 b of the Dr-TFT 6and the power supply (Vdd) line 60. Moreover, the drain electrode 24 bof the Sw-TFT 5 is connected to the gate electrode 30 b of the Dr-TFT 6,and the source electrode 24 a of the Sw-TFT 5 is connected to a dataline 62. Furthermore, the gate electrode 30 a of the Sw-TFT 5 isconnected to a scan line 64.

The following operations are performed in the equivalent circuit shownin FIG. 3. First, when a potential of the scan line 64 is set in aselected state and a write potential is applied to the scan line 64, theSW-TFT 5 is connected and the retention capacity Cs is charged ordischarged. Thus, a gate potential of the Dr-TFT 6 is set to be thewrite potentiaL Next, when the potential of the scan line 64 is set in anonselected state, the scan line 64 and the Dr-TFT 6 are electricallydisconnected from each other. However, the gate potential of the Dr-TFT6 is stably retained by the retention capacity Cs.

Meanwhile, a current flowing through the Dr-TFT 6 and the organic ELelement 2 is set to have a value corresponding to a value of agate-source voltage of the Dr-TFT 6. Thus, the organic EL element 2continues to emit light with luminance corresponding to the currentvalue.

A plurality of pixels having the configuration as described above arearranged in a matrix manner, and write is repeated through the datalines 62 while the scan lines 64 is being sequentially selected. Thus,an active matrix organic EL display can be composed. Consequently,lights of predetermined colors are emitted to the outside from therespective emitting layers 42R, 42G and 42B in the respective pixelparts (R), (G) and (B). Thus, a color image is obtained (the directionindicated by the arrows in FIG. 2).

Note that, as a problem of the organic TFT, there is a variation incharacteristics of the organic TFT. Particularly, if there is avariation in a threshold voltage (Vth) of the Dr-TFT 6, there occurs avariation in illuminance within a screen of a display. Thus, there havebeen taken measures to compensate for the variation in the thresholdvoltage (Vth) of the Dr-TFT 6 by providing a compensation circuit in theequivalent circuit shown in FIG. 3. As such a compensation circuit,there are a current program system and a voltage program system, inwhich two transistors are added (Reference: 2003 FPD Technology Outlook,Electronic Journal Publishing (2003)).

There has been developed a method of adding a compensation circuit to acircuit using a low-temperature polysilicon TFT or an amorphous siliconTFT. However, similar effects can also be obtained by adding acompensation circuit to a circuit using an organic TFT as in the case ofthis embodiment.

Note that, in the first embodiment described above, as in the case of asecond embodiment to be described next, more color filter layers buriedin the adhesive layer 34 may be provided by attaching the plastic film40 by use of the adhesive layer 34 after color filter layers are formedon the protective layer 32. In this case, a full-color display isrealized by combination of the color filter layers and the lightemission of red (R), green (G) and blue (B). Thus, color saturation canbe improved.

Second Embodiment

FIG. 5 is a cross-sectional view showing a flexible display (an organicEL display) according to a second embodiment of the present invention.In the second embodiment, a full-color display is realized by using awhite emitting layer as an emitting layer in an organic EL layer andcombining color filter layers. In FIG. 5, the same components as thoseof the first embodiment shown in FIG. 2 are denoted by the samereference numerals, and description thereof will be omitted.

As shown in FIG. 5, a flexible organic EL display 1 a of the secondembodiment is formed by replacing all the red, green and blue layers42R, 42G and 42B in the first embodiment shown in FIG. 2 with whiteemitting layers 42. Moreover, between a protective layer 32 and anadhesive layer 34, color filter layers 52R, 52G and 52B are formed in astate of being buried in the adhesive layer 34. The color filter layersinclude a red color filter layer 52R formed in a red pixel part (R), agreen color filter layer 52G 14 formed in a green pixel part (G), and ablue color filter layer 52B formed in a blue pixel part (B). In thesecond embodiment, white light is emitted from the white emitting layers42 in the respective pixel parts (R), (G) and (B). Thereafter, the whitelight passes through the color filter layers 52R, 52G and 52B of thethree primary colors. Thus, a color image is obtained (the directionindicated by the arrows in FIG. 5).

In a method of manufacturing a flexible display according to the secondembodiment, the color filter layers 52R, 52G and 52B are formed on theprotective layer 32 after the step of FIG. 1F in the first embodiment.Specifically, on the protective layer 32 above respective pixelelectrodes 26 corresponding to the pixel parts (R), (G) and (B) of thethree primary colors, the red color filter layer 52R, the green colorfilter layer 52G and the blue color filter layer 52B are sequentiallyformed. The respective color filter layers 52R, 52G and 52B are formedby patterning photosensitive coating films of a pigment dispersion type,for example, by photolithography. Thereafter, a plastic film 40 isattached to the color filter layers 52R, 52G and 52B with the adhesivelayer 34 interposed therebetween. Subsequently, as in the case of thefirst embodiment, a transfer layer is transferred and formed on theplastic film 40.

Thereafter, by use of a method similar to that of the first embodiment,a sealing layer 48 is formed after organic active layers 36 a and 36 band organic EL elements 2 are formed.

The flexible organic EL display 1 a of the second embodiment achievesthe same effects as those of the first embodiment.

Third Embodiment

FIGS. 6A to 6K are cross-sectional views sequentially showing a methodof manufacturing a flexible display according to a third embodiment ofthe present invention. In the first embodiment, the organic activelayers and the organic EL layers for the TFTs are formed by the maskvapor deposition. Meanwhile, in the third embodiment, organic activelayers and organic EL layers for TFTs are formed by an ink jet method orprinting. In the third embodiment, detailed description of the samesteps as those of the first embodiment will be omitted.

First, as shown in FIG. 6A, after a peelable layer 22 is formed on aglass substrate 20 as in the case of the first embodiment, a mask metallayer 25 having openings 25 x provided in required portions is patternedon the peelable layer 22. As a material of the mask metal layer 25,aluminum (Al), silver (Ag) or the like is used. The openings 25 x of themask metal layer 25 are provided in portions corresponding to regionswhere organic active layers and a pixel electrode (an emitting layer)for TFTs to be formed later are formed.

Next, as shown in FIG. 6B, after a coating film such as a polyimideresin is formed on the peelable layer 22 and the mask metal layer 25 byuse of a spin coating method, printing or the like, the coating film ishardened by heat treatment at a temperature of 200 to 300 Ê. Thus, anorganic insulating layer 27 a having a thickness of, for example, 2 to 5fÊm is obtained. As the organic insulating layer 27 a, besides thepolyimide resin, used is, material which can be etched by plasma of gasconsisting mainly of oxygen gas, such as a PMMA (polymethylmethacrylate) resin and an acrylic resin. In this embodiment, formationof the organic insulating layer 27 a, which involves heat treatment, isperformed on the glass substrate 20. Thus, a plastic film to be asubstrate at the end is never thermally deformed.

Subsequently, as shown in FIG. 6C, by use of a method similar to that ofthe first embodiment, source and drain electrodes 24 a and 24 b for aSW-TFT and source and drain electrodes 24 x and 24 y for a Dr-TFT areformed on the organic insulating layer 27 a. Thereafter, a pixelelectrode 26 is formed, which is electrically connected to the drainelectrode 24 y for the Dr-TFT.

Furthermore, as shown in FIG. 6D, by use of a method similar to that ofthe first embodiment, a gate insulating layer 28 is formed, the gateinsulating layer covering the source electrodes 24 a and 24 x, the drainelectrodes 24 b and 24 y, and the pixel electrode 26. Thereafter, a gateelectrode 30 a for the SW-TFT and a gate electrode 30 b for the Dr-TFTare formed on the gate insulating layer 28. Furthermore, a protectivelayer 32 which covers the gate electrodes 30 a and 30 b is formed.

Next, as shown in FIG. 6E, by use of a method similar to that of thefirst embodiment, a plastic film 40 is attached to an upper surface ofthe structure shown in FIG. 6D with the adhesive layer 34 interposedtherebetween. Thereafter, the glass substrate 20 is peeled while a roll29 fixed to one end of the plastic film 40 is being rotated. In thisevent, the glass substrate 20 is peeled along an interface (the portionA in FIG. 6E) between the glass substrate 20 and the peelable layer 22,and is discarded.

Thus, as shown in FIG. 6F, on the plastic film 40, the adhesive layer34, the protective layer 32, the gate electrodes 30 a and 30 b, the gateinsulating layer 28, the source electrodes 24 a and 24 x, the drainelectrodes 24 b and 24 y and the pixel electrode 26, the organicinsulating layer 27 a, the mask metal layer 25 and the peelable layer 22are transferred and formed sequentially from the bottom.

Thereafter, as shown in FIG. 6G, the peelable layer 22 is removed by useof oxygen gas plasma, and the organic insulating layer 27 a is etched byusing the exposed mask metal layer 25 as a mask and using the oxygen gasplasma. Thus, an organic insulating layer pattern 27 is obtained. Byusing oxygen gas plasma in an isotropic etching device, the organicinsulating 16 layer 27 a (the polyimide resin or the PMMA resin) isisotropically etched from the mask metal layer 25. Thus, the organicinsulating layer pattern 27 having a forward tapered shape (a shapewhich gets gradually wider toward its bottom) is obtained. In thisembodiment, it is possible to obtain the organic insulating layerpattern 27 having a forward tapered shape with a tapered angle flE (FIG.6G) of 60° or less (preferably 60° to)30°.

Note that, in the case where the acrylic resin is used as the organicinsulating layer 27 a, the layer is etched by use of plasma of mixed gasobtained by adding gas containing fluorine atoms such as CF₄ to oxygengas by 2 to 5%.

Subsequently, as shown in FIG. 6H, the mask metal layer 25 isselectively removed with respect to the underlying layer. For example,in the case where an Al layer is used as the mask metal layer 25, wetetching using a solution containing phosphoric acid is adopted. Thus,the mask metal layer 25 is removed without damaging the pixel electrode26, the source electrodes 24 a and 24 x, the drain electrodes 24 b and24 y, and the like.

Thus, the organic insulating layer pattern 27 having the forward taperedshape is exposed and formed in a state where openings 27 x are providedon the pixel electrode 26 and on spaces between the source electrodes 24a and 24 x and the drain electrodes 24 b and 24 y, respectively.

Thereafter, the upper surface of the structure shown in FIG. 6H isexposed to plasma of gas containing fluorine atoms (CF₄, SF₆, CHF₃ orthe like). Thus, adhesion of the fluorine atoms to upper surfaces andsides of the organic insulating layer pattern 27 allows the pattern tohave water repellency for repelling liquids. At the same time, theexposed surface of the pixel electrode 26 becomes hydrophilic.

Next, as shown in FIG. 6I, a coating liquid 33 for forming organicactive layers of TFTs is applied from a nozzle 31 of an ink jetapparatus (not shown) into the openings 27 x of the organic insulatinglayer pattern 27 on the spaces between the source electrodes 24 a and 24x and the drain electrodes 24 b and 24 y. Thus, coating films areformed. Furthermore, the coating films are baked at a temperature of 100to 200 {hacek over (Z)} to be dried. Thus, an organic active layer 36 afor the Sw-TFT and an organic active layer 36 b for the Dr-TFT areformed. As the coating liquid 33 for forming the organic active layers36 a and 36 b, one containing an organic semiconductor material such aspentacene, sexithiophene and poly thiophene, which are described in thefirst embodiment, is used. In this event, since the surface of theorganic insulating layer pattern 27 is set to be water-repellent, evenif the nozzle 31 of the ink jet apparatus is slightly shifted from theopenings 27 x of the organic insulating layer pattern 27, the coatingliquid 33 flows toward the openings 27 x to be accumulated therein.Thus, a Sw-TFT 5 and a Dr-TFT 6 are obtained, both of which have thesimilar structures as those of the first embodiment.

Subsequently, as also shown in FIG. 6I, by use of the same ink jetmethod, a coating liquid (not shown) of a thiophene-based conductivepolymer (PEDOT/PSS) is applied to the opening 27 x of the organicinsulating layer pattern 27 on the pixel electrode 26. Thereafter, thecoating liquid is baked at a temperature of 100 to 200 Ê to be dried.Thus, a hole transport layer 38 is formed.

Furthermore, as also shown in FIG. 6I, by use of the same ink jetmethod, a coating liquid for forming an emitting layer is applied to thehole transport layer 38 in the opening 27 x of the organic insulatinglayer pattern 27. Thereafter, the coating liquid is baked at atemperature of 100 to 200 {hacek over (Z)} to be dried. Thus, anemitting layer 42 is formed. Although FIG. 6I shows only one pixel part,as in the case of the first embodiment, a red emitting layer, a greenemitting layer and a blue emitting layer are formed, respectively, onthe hole transport layers 38 in the respective pixel parts (R), (G) and(B) of the three primary colors.

As a material of the emitting layers for forming the emitting layers ofthe three primary colors, there are a fI-conjugated polymer emittingmaterial and a pigment-containing polymer emitting material. To be morespecific, as the fI-conjugated polymer emitting material, there arepolyfluorene (PF) dielectrics (red, green and blue), poly-spirodielectrics (red, green and blue), polyparaphenylene dielectrics,polythiophene dielectrics, and the like.

Meanwhile, as the pigment-containing polymer emitting material, thereare a pigment dispersion PVK (red, green and blue) that is an emittingmaterial obtained by dispersing a phosphorescent or fluorescentlow-molecular-weight pigment in polyvinylcarbazole (PVK); and aside-chain integration PVK (red, green and blue) that is aphosphorescent polymer in which a phosphorescent base such as Ir(ppy)₃is integrated with a side chain of PVK.

The materials described above are dissolved in a solvent such as xylene,toluene, chloroform, anisole, tetradecane, dichloroethane,chlorobenzene, benzene and dichlorobenzene. Thereafter, coating liquids(ink) for forming the emitting layers of the respective colors areprepared.

As described above, an organic EL layer 3 a is obtained, the organic ELlayer including the hole transport layer 38 and the emitting layer 42.Note that, as in the case of the first embodiment, an electron transportlayer may be further formed on the emitting layer 42 or only one of thehole transport layer 38 and the electron transport layer may be formed.Alternatively, both of the hole transport layer 38 and the electrontransport layer may be omitted.

In the third embodiment, the organic active layers 36 a and 36 b and theorganic EL layer 3 a for the TFTs are formed by use of the ink jetmethod. Thus, as in the case of the first embodiment, there is no riskthat performance of the organic active layers 36 a and 36 b and theorganic EL layer 3 a is deteriorated by various processing in thephotolithography step.

Moreover, when the hole transport layer 38 and the emitting layer 42 areformed by use of the ink jet method, since the surface of the organicinsulating layer pattern 27 is set to be water-repellent, the holetransport layer 38 and the emitting layer 42 are formed so as to bealigned in the opening 27 x of the organic insulating layer pattern 27.

Note that the organic EL layer 3 a may be formed first before theorganic active layers 36 a and 36 b are formed. Moreover, the organicactive layers 36 a and 36 b and the organic EL layer 3 a may be formedby screen printing instead of the ink jet method.

Next, as shown in FIG. 6J, a metal electrode 46, such as acalcium/aluminum (Ca/Al) laminated film, a barium (Ba) film and abarium/aluminum (Ba/A!) laminated film, is formed on the emitting layer42 by mask vapor deposition. Thus, an organic EL element 2 a isobtained, the organic EL element including the pixel electrode 26, theorganic EL layer 3 a and the metal electrode 46.

Thereafter, as shown in FIG. 6K, a sealing layer 48 which covers theorganic EL element 2 a, the SW-TFT 5 and the Dr-TFT 6 is formed, as inthe case of the first embodiment.

Thus, a flexible organic EL display Ib of the third embodiment iscompleted.

As shown in FIG. 6K, in the flexible organic EL display 1 b of the thirdembodiment, the plastic film 40 is used as a substrate, and theprotective film 32 is formed thereon with the adhesive layer 34interposed therebetween. In the protective film 32, the gate electrode30 a of the Sw-TFT 5 and the gate electrode 30 b of the Dr-TFT 6 areburied. On the gate electrodes 30 a and 30 b, the gate insulating layer28 is formed.

Moreover, on the gate insulating layer 28, the source and drainelectrodes 24 a and 24 b for the SW-TFT 5, the source and drainelectrodes 24 x and 24 y for the Dr-TFT 6, and the pixel electrode 26electrically connected to the drain electrode 24 y for the Dr-TFT 6 areformed.

Furthermore, the organic insulating layer pattern 27 is formed, whichhas the openings 27 x provided on the pixel electrode 26 and on thespaces between the source electrodes 24 a and 24 x and the drainelectrodes 24 b and 24 y. The organic insulating layer pattern 27 isformed to have a forward tapered shape with a tapered angle of 60< orless, and has a waterrepellent surface.

Moreover, in the openings 27 x of the organic insulating layer pattern27 on the spaces between the source electrodes 24 a and 24 x and thedrain electrodes 24 b and 24 y, the organic active layers 36 a and 36 bfor the Sw-TFT 5 and the Dr-TFT 6 are formed, respectively. The holetransport layer 38 and the emitting layer 42 are formed in the opening27 x of the organic insulating layer pattern 27 on the pixel electrode26. As in the case of FIG. 2 of the first embodiment, a plurality of thepixel electrodes 26 are set in a red (R) pixel part, a green (G) pixelpart and a blue (B) pixel part. Moreover, red, green and blue emittinglayers (not shown) are formed so as to correspond to the pixel parts ofthe respective colors. Furthermore, the hole transport layer 38 and theemitting layer 42 form the organic EL layer 3 a. The organic EL layer 3a is formed with high accuracy in each of the pixel parts of the threeprimary colors while being defined by the organic insulating layerpattern 27 which functions as a partition wall in formation of the layerby use of the ink jet method.

Furthermore, the metal electrode 46 is formed on the organic EL layer 3a, and the organic EL element 2 a is formed of the pixel electrode 26,the organic EL layer 3 a and the metal electrode 46. The sealing layer48 which covers the organic EL element 2 a, the Sw-TFT 5 and the Dr-TFT6 is formed thereon.

The flexible organic EL display 1 b of the third embodiment has theconfiguration as described above. As in the case of the firstembodiment, lights of predetermined colors are emitted to the outsidefrom the emitting layers 42 of the respective colors. Thus, a colorimage is obtained (the direction indicated by the arrows in FIG. 6K).

In the method of manufacturing a flexible display according to the thirdembodiment, first, a transfer layer is formed with high accuracy on theheat-resistant glass substrate 20 without having manufacturingconditions limited. Specifically, the transfer layer includes thepeelable layer 22, the mask metal layer 25, the organic insulating layer27 a, the source electrodes 24 a and 24 x, the drain electrodes 24 b and24 y, the pixel electrode 26, the gate insulating layer 28, the gateelectrodes 30 a and 30 b, and the protective layer 32.

Thereafter, the transfer layer is transferred and formed in a state ofbeing inverted upside down on the plastic film 40 with the adhesivelayer 34 interposed therebetween. Next, after the peelable layer 22 isremoved by use of oxygen plasma, the organic insulating layer 27 a iscontinuously etched by using the exposed mask metal layer 25 as a maskand using the oxygen plasma. Thereafter, the mask metal layer 25 isremoved.

Accordingly, the organic insulating layer pattern 27 is formed, whichhas the openings 27 x provided on the pixel electrode 26 above theplastic film 40 and on the spaces between the source electrodes 24 a and24 x and the drain electrodes 24 b and 24 y. Thereafter, surfacetreatment is performed by use of the plasma of the gas containingfluorine atoms. Thus, the surface of the organic insulating layerpattern 27 is set to be waterrepellent, and the surface of the pixelelectrode 26 is set to be hydrophilic.

Furthermore, by use of the ink jet method, the organic active layers 36a and 36 b are formed in the openings 27 x of the organic insulatinglayer pattern 27 on the spaces between the source electrodes 24 a and 24x and the drain electrodes 24 b and 24 y. Subsequently, in the opening27 x of the organic insulating layer pattern 27 on the pixel electrode26, the hole transport layer 38 and the emitting layer 42 of each of thethree primary colors are sequentially formed by use of the ink jetmethod. Thus, the organic EL layer 3 a is obtained. In this event, theorganic insulating layer pattern 27 is formed 'to have a forward taperedshape and a water-repellent surface. Accordingly, the organic insulatinglayer pattern 27 serves as a partition wall to allow the respectivecoating liquids to flow into the openings 27 x with high accuracy. Thus,the organic active layers 36 a and 36 b and the organic EL layer 3 a areformed with high alignment accuracy. Thereafter, the metal electrode 46is formed on the organic EL layer 3 a to obtain the organic EL element 2a. Subsequently, the sealing layer 48 which covers the organic ELelement 2 a is formed.

In the third embodiment, a patterning step (the step of forming thesource electrodes 24 a and 24 x, the drain electrodes 24 b and 24 y, thepixel electrode 26, and the gate electrodes 30 a and 30 b) byphotolithography which adversely affects the organic active layers 36 aand 36 b and the organic EL layer 3 a is performed on the glasssubstrate 20. Subsequently, after the electrodes described above aretransferred onto the plastic film 40, the organic active layers 36 a and36 b and the organic EL layer 3 a are formed by use of the ink jetmethod. Therefore, there is no longer a risk that the organic activelayers 36 a and 36 b and the organic EL layer 3 a are deteriorated byvarious processing in the photolithography step.

As described above, in the third embodiment, it is made possible tostably manufacture, with high yield, a flexible organic EL display whichuses a plastic film as a substrate and includes organic TFTs.

Fourth Embodiment

FIGS. 7A to 7H are cross-sectional views showing a method ofmanufacturing a flexible display according to a fourth embodiment of thepresent invention. FIG. 8 is a cross-sectional view showing a flexibledisplay (a liquid crystal display) according to the fourth embodiment ofthe present invention. In the fourth embodiment, the case of applyingthe present invention to a liquid crystal display will be described asan example. In the fourth embodiment, detailed description of the samesteps as those of the first embodiment will be omitted. Moreover, thesame components as those of the first embodiment are denoted by the samereference numerals, and description thereof will be omitted.

In the method of manufacturing a flexible display according to thefourth embodiment of the present invention, as shown in FIG. 7A, first,a peelable layer 22 is formed on a glass substrate 20 as a temporarysubstrate. Thereafter, source and drain electrodes 24 a and 24 b of aTFT for switching are formed. Subsequently, a pixel electrode 26, whichis electrically connected to the drain electrode 24 b and is made of ITOor the like, is formed on the peelable layer 22.

Next, as shown in FIG. 7B, a gate insulating layer 28 is formed, thegate insulating layer covering the source electrode 24 a, the drainelectrode 24 b and the pixel electrode 26. Thereafter, as shown in FIG.7C, a gate electrode 30 for the TFT is formed on the gate insulatinglayer 28 in a portion above a space between the source and drainelectrodes 24 a and 24 b so as to overlap above ends thereof.

Subsequently, as shown in FIG. 7D, after a protective layer 32 whichcovers the gate electrode 30 is formed, a color filter layer 50 isformed on the protective layer 32 in a portion corresponding to thepixel electrode 26. In this embodiment, description is given of the casewhere a full-color display is realized by the color filter layer 50, asan example. Although FIG. 7D shows only one pixel part, a red (R) colorfilter layer, a green (G) color filter layer and a blue (B) color filterlayer are formed, respectively, above the respective pixel electrodes 26in respective pixel parts (R), (G) and (B) of the three primary colorsas shown in FIG. 2 of the first embodiment. The pixel parts (subpixels)of the three primary colors form a pixel that is a display unit. Therespective color filter layers 50 of the three primary colors are formedby sequentially patterning photosensitive coating films of a pigmentdispersion type, for example, by photolithography.

Subsequently, as shown in FIG. 7E, a first plastic film 40 is attachedto the structure shown in FIG. 7D with an adhesive layer 34 interposedtherebetween. Thereafter, the glass substrate 20 is peeled while a roll29 fixed to one end of the first plastic film 40 is being rotated. Inthis event, the glass substrate 20 is peeled along an interface (theportion A in FIG. 7E) between the glass substrate 20 and the peelablelayer 22, and is discarded.

Thus, as shown in FIG. 7F, on the first plastic film 40, the adhesivelayer 34, the color filter layer 50, the protective layer 32, the gateelectrode 30, the gate insulating layer 28, the source and drainelectrodes 24 a and 24 b and the pixel electrode 26, and the peelablelayer 22 are transferred and formed sequentially from the bottom.

Next, as shown in FIG. 7G, by removing the peelable layer 22, uppersurfaces of the source electrode 24 a, the drain electrode 24 b and thepixel electrode 26 are exposed.

Thereafter, as shown in FIG. 7H, an organic active layer 36 for the TFTis formed on a space between the source and drain electrodes 24 a and 24b by mask vapor deposition. Thus, a TFT 7 for switching is obtained, theTFT including the gate electrode 30, the gate insulating layer 28, thesource and drain electrodes 24 and 24 b, and the organic active layer36.

Note that, as in the case of the third embodiment, an organic insulatinglayer pattern, which has an opening provided on the space between thesource and drain electrodes 24 a and 24 b, may be provided to form theorganic active layer 36 in the opening by use of an ink jet method orscreen printing.

Subsequently, a resin layer 52, which covers the organic active layer36, is formed by use of a photo-setting resin such as a PVA (polyvinylalcohol) resin. Thus, a step of the organic active layer 36 isflattened. Thereafter, a first alignment film 54 a for aligning liquidcrystal is formed on the resin layer 52. Note that, if there is notrouble caused by the step of the organic active layer 36, the resinlayer 52 may be omitted.

Thus, a TFT substrate 8 for a liquid crystal display is obtained.

As shown in FIG. 7H, in the TFT substrate 8 for the liquid crystaldisplay, the first plastic film 40 is used as a substrate, the adhesivelayer 34 is formed thereon, and the color filter layer 50 is buried inthe adhesive layer 34. Moreover, the protective layer 32 is formed onthe color filter layer 50, and the gate electrode 30 is buried in theprotective layer 32. On the gate electrode 30, the gate insulating layer28 is formed.

Furthermore, on the gate insulating layer 28, the source and drainelectrodes 24 a and 24 b for the TFT 7 and the pixel electrode 26electrically connected to the drain electrode 24 b are formed. On thespace between the source and drain electrodes 24 a and 24 b, the organicactive layer 36 for the TFT 7 is formed. Moreover, both ends of theorganic active layer 36 are electrically connected to the source anddrain electrodes 24 a and 24 b, respectively.

The organic active layer 36 is covered with the resin layer 52, and thestep thereof is flattened. On the resin layer 52, the first alignmentfilm 54 a is formed.

Next, as shown in FIG. 8, the TFT substrate 8 and a counter substrate 9are prepared. The counter substrate 9 is basically composed of a secondplastic film 40 a, a common electrode 58 which is formed thereon andmade of ITO or the like, and a second alignment film 54 b formedthereon. In a state where a predetermined space is secured, by use of aspacer, between the TFT substrate 8 and the counter substrate 9, theboth substrates are attached so as to face each other by use of a sealmember (not shown) which is provided in a peripheral part. Furthermore,liquid crystal 60 is sealed between the TFT substrate 8 and the countersubstrate 9.

Thus, a flexible liquid crystal display Ic of the fourth embodiment iscompleted. Note that the color filter layer 50 may be provided in thecounter substrate 9 instead of providing the color filter layer 50 inthe TFT substrate 8.

Although not particularly shown in the drawings, a data bus line isconnected to the source electrode 24 a of the TFT 7, and a gate bus lineis connected to the gate electrode 30 of the TFT 7. At a predeterminedtiming, a gradation voltage is sequentially applied to the pixelelectrode 26 of each pixel from the gate bus line and the data bus linethrough the TFT 7. Thus, an image is displayed.

In the fourth embodiment, as in the case of the first embodiment, it isnot required to perform a photolithography step after the organic activelayer 36 in the TFT substrate 8 is formed. Thus, there is no longer arisk that performance of the organic active layer 36 is deteriorated byvarious processing in the photolithography step.

As described above, in the fourth embodiment, it is made possible tostably manufacture, with high yield, an active matrix flexible liquidcrystal display which uses an element substrate having organic TFTsformed on a plastic film.

Fifth Embodiment

FIGS. 9A to 9O are cross-sectional views showing a method ofmanufacturing a flexible display according to a fifth embodiment of thepresent invention. FIG. 10 is a cross-sectional view showing a flexibledisplay (an organic EL display) according to the fifth embodiment of thepresent invention. In the fifth embodiment, the case of applying thepresent invention to an organic EL display will be described as anexample. In the method of manufacturing a flexible display according tothe fifth embodiment of the present invention, as shown in FIG. 9A,first, a glass substrate 20 is prepared as a temporary substrate, and apeelable layer 22 made of a polyimide resin and the like is formed onthe glass substrate 20.

Thereafter, as shown in FIG. 9B, a conductive layer made of gold (Au)having a thickness of, for example, 100 nm or the like is formed on thepeelable layer 22. Subsequently, the conductive layer is patterned byphotolithography and etching. Thus, a source electrode 24 a and a drainelectrode 24 b of a switching TFT (thin film transistor) (hereinafterreferred to as a Sw-TFT) and a source electrode 24 x and a drainelectrode 24 y of a driving TFT (hereinafter referred to as a Dr-TFT)are formed.

Subsequently, by use of a sputtering method, a transparent conductivelayer such as an ITO (indium tin oxide) layer having a thickness of, forexample, 150 nm is formed on the peelable layer 22, the sourceelectrodes 24 a and 24 x and the drain electrodes 24 b and 24 y.Thereafter, the transparent conductive layer is patterned byphotolithography and etching. Thus, as shown in FIG. 9C, a pixelelectrode 26 electrically connected to the drain electrode 24 y for theDr-TFT is formed on the peelable layer 22. Note that the pixel electrode26 may be formed so as to overlap with an end of the drain electrode 24y for the Dr-TFT. In this embodiment, the ITO layer to be the pixelelectrode 26 is formed above the heat-resistant glass substrate 20.Thus, it is possible to adopt a sputtering method using a depositiontemperature of about 200 {hacek over (Z)}, and the like. Thus, the pixelelectrode 26 (ITO) is formed so as to have low-resistance (a specificresistance value: 3 ˜1O′4 f¶ Ecm or less) electrical characteristics.

Next, as shown in FIG. 9D, a protective layer 28 is formed, which coversthe source electrodes 24 a and 24 x, the drain electrodes 24 b and 24 yand the pixel electrode 26, and is made of an acrylic resin or the like.

Thereafter, as shown in FIG. 9E, a conductive layer made of tantalum(Ta), aluminum (Al), chromium (Cr), IZO, ITO or the like is formed onthe protective layer 28 by use of vapor deposition, the sputteringmethod or the like. Subsequently, the conductive layer is patterned byphotolithography and etching. Thus, a gate electrode 30 a for the Sw-TFTis formed on the protective layer 28 above a space between the sourceand drain electrodes 24 a and 24 b for the Sw-TFT so as to overlap aboveends thereof, respectively. Moreover, at the same time, a gate electrode30 b for the Dr-TFT is formed on the protective layer 28 above a spacebetween the source and drain electrodes 24 x and 24 y for the Dr-TFT soas to overlap above ends thereof, respectively.

Accordingly, on the glass substrate 20, the source electrodes 24 a and24 x, the drain electrodes 24 b and 24 y, the pixel electrode 26, andthe gate electrodes 30 a and 30 b are formed while being miniaturizedwith high accuracy in a desired pattern by photolithography.

Subsequently, as shown in FIG. 9F, a gate insulating layer 32 is formed.the gate insulating layer covering the respective gate electrodes 30 aand 30 b. As the gate insulating layer 32, a silicon oxide layer(SiO_(x) layer), a tantalum oxide layer (Ta₂O₅ layer) or the like, whichhas a thickness of for example 200 nm is used. The insulating layerdescribed above is formed by use of CVD, the sputtering method or thelike.

Next, as shown in FIG. 9G, the gate insulating layer 32 and theprotective layer 28 are processed by photolithography and etching. Thus,formed are first via holes 32 x having depths that reach the source anddrain electrodes 24 a and 24 b for the Sw-TFT, respectively, and secondvia holes 32 y having depths that reach the source and drain electrodes24 x and 24 y for the Dr-TFT, respectively.

Subsequently, as shown in FIG. 9H, an organic active layer 36 a for theSw-TFT is formed on the gate insulating layer 32. Specifically, theorganic active layer 36 a is electrically connected to the source anddrain electrodes 24 a and 24 b for the Sw-TFT through the first viaholes 32 x. At the same time, an organic active layer 36 b for theDr-TFT is formed on the gate insulating layer 32. Specifically, theorganic active layer 36 b is electrically connected to the source anddrain electrodes 24 x and 24 y for the Dr-TFT through the second viaholes 32 y.

As a material for each of the organic active layers 36 a and 36 b, anorganic semiconductor such as pentacene, sexithiophene and polythiopheneis used. The organic active layers 36 a and 36 b are formed on the gateinsulating layer 32 in a state of being buried in the first and secondvia holes 32 x and 32 y by mask vapor deposition. Each of the organicactive layers 36 a and 36 b has a thickness of, for example, about 50nm. The mask vapor deposition is a method of forming a patternsimultaneously with deposition by moving a shadow mask with highaccuracy in a vacuum evaporator. Therefore, without usingphotolithography, the patterned organic active layers 36 a and 36 b canbe formed. Thus, there is no risk that performance of the organic activelayers 36 a and 36 b is deteriorated by wet processing, plasma and thelike in the photolithography step.

Note that the organic active layers 36 a and 36 b may be formed afterfilling the first and second via holes 32 x and 32 y with a conductivematerial such as a conductive pste, as long as the organic active layers36 a and 36 b are electrically connected to the source electrodes 24 aand 24 x and the drain electrodes 24 b and 24 y through the first andsecond via holes 32 x and 32 y.

Accordingly, a Sw-TFT 5 is obtained, the Sw-TFT including the gateelectrode 30 a, the gate insulating layer 32, the source electrode 24 a,the drain electrode 24 b and the organic active layer 36 a connected tothe source and drain electrodes 24 a and 24 b. Moreover, a Dr-TFT 6 isobtained, the Dr-TFT including the gate electrode 30 b, the gateinsulating layer 32, the source electrode 24 x, the drain electrode 24 yand the organic active layer 36 b connected to the source and drainelectrodes 24 x and 24 y.

Next, as shown in FIG. 9I, a barrier insulating layer 37 which coversthe organic active layers 36 a and 36 b is formed. As the barrierinsulating layer 37, an inorganic insulating layer, such as a siliconoxide layer (SiO_(x)), a silicon nitride layer (SiN_(x)) and a siliconoxide nitride layer (SiON), which can block intrusion of water vapor, issuitably used. Moreover, the barrier insulating layer 37 is formed byuse of a CVD method or a sputtering method. Note that two or more layersmay be selected from the SiO_(x) layer, the SiN_(X) layer and the SiONlayer and laminated.

Thereafter, as shown in FIG. 9J, a plastic film 40 is disposed on anupper surface of the barrier insulating layer 37 shown in FIG. 9I withan adhesive layer 34 interposed therebetween. Furthermore, the adhesivelayer 34 is hardened by heat treatment to attach the plastic film 40 tothe structure shown in FIG. 9I. As the plastic film 40, apolyethersulfone film, a polycarbonate film or the like, which has athickness of 100 to 200 fÊm, is preferably used.

Subsequently, as also shown in FIG. 9I, a roll 29 is fixed to one end ofthe plastic film 40, and the glass substrate 20 is peeled while the roll29 is being rotated. In this event, the glass substrate 20 is peeledalong an interface (the portion A in FIG. 9J) between the glasssubstrate 20 and the peelable layer 22, and is discarded.

Thus, as shown in FIG. 9K, on the plastic film 40, the adhesive layer34, the barrier insulating layer 37, the organic active layers 36 a and36 b, the gate insulating layer 32, the gate electrodes 30 a and 30 b,the protective layer 28, the source electrodes 24 a and 24 x, the drainelectrodes 24 b and 24 y and the pixel electrode 26, and the peelablelayer 22 are transferred and formed sequentially from the bottom.

Thereafter, as shown in FIG. 9L, the peelable layer 22 is removed by useof oxygen gas plasma. Thus, upper surfaces of the source electrodes 24 aand 24 x, the drain electrodes 24 b and 24 y, and the pixel electrode 26are exposed.

As described above, in this embodiment, adopted is the method oftransferring and forming the respective TFTs 5 and 6 in a state of beinginverted upside down on the plastic film 40 after the TFTs are formed tohave a structure in which the organic active layers 36 a and 36 b aredisposed on the upper side on the glass substrate 20. Therefore, theorganic active layers 36 a and 36 b are never exposed to the upper sideof the plastic film 40 but are set in a state of being buried in thebottom. Thus, there is no longer a risk that the organic active layers36 a and 36 b are damaged by the subsequent various processing steps.

Subsequently, as shown in FIG. 9M, a hole transport layer 38 having athickness of, for example, 30 nm is selectively formed on the pixelelectrode 26 by mask vapor deposition. As the hole transport layer 38, ƒ

-NPD that is an aromatic tertiary amine derivative or the like issuitably used. Furthermore, as also shown in FIG. 9M, alow-molecular-weight emitting layer 42 having a thickness of, forexample, 70 nm is selectively formed on the hole transport layer 38 bymask vapor deposition. In this embodiment, description is given of thecase where a full-color display is realized by forming emitting layersof three primary colors, as an example. Thus, as described later withreference to FIG. 10, a red emitting layer, a green emitting layer and ablue emitting layer are formed, respectively, on the hole transportlayers 38 in respective pixel parts of three primary colors (red (R),green (G) and blue (B)). The pixel parts (subpixels) of the threeprimary colors form a pixel that is a display unit.

As the low-molecular-weight emitting layer 42, one obtained by mixing adoping material with a host material is used. The doping material(molecules) emits light. As the host material, there are, for example,Alq3 and a distyryl arylene derivative (DPVBi). As the doping material,there are, for example, coumarin 6 which emits green light DCJTB whichemits red light, and the like.

Subsequently, as also shown in FIG. 9M, an electron transport layer 44is formed on the emitting layer 42 by mask vapor deposition. As theelectron transport layer 44, a quinolinol aluminum complex (Alq3) or thelike is suitably used.

Thus, an organic EL layer 3 is obtained, the organic EL layer includingthe hole transport layer 38, the emitting layer 42 and the electrontransport layer 44.

Note that only on of the hole transport layer 38 and the electrontransport layer 44 may be formed or both of the hole transport layer 38and the electron transport layer 44 may be omitted.

Furthermore, as shown in FIG. 9N, a metal electrode 46 is selectivelyformed on the electron transport layer 44 by mask vapor deposition. Asthe metal electrode 46, a lithium fluoride/aluminum (LiF/Al) laminatedfilm or the like is suitably used. A thickness of a LiF layer is set to0.2 to 1 nm, and a thickness of an Al layer is set to 100 to 200 nm.

Thus, an organic EL element 2 is obtained, the organic EL elementincluding the pixel electrode 26, the organic EL layer 3 and the metalelectrode 46.

As described above, in this embodiment, photolithography is not used inthe step of forming the organic active layers 36 a and 36 b and theorganic EL layer 3 and the subsequent steps. Thus, there is no longer arisk that performance of the organic active layers 36 a and 36 b and theorganic EL layer 3 is deteriorated by various processing in thephotolithography step.

Thereafter, as shown in FIG. 9O, a sealing layer 48 is formed, thesealing layer covering the organic EL element 2, the Sw-TFT 5 and theDr-TFT 6. As the sealing layer 48, a silicon oxide layer (SiO_(x)), asilicon nitride layer (SiN_(x)), a silicon nitride layer (SiN_(x)) orthe like is used. The sealing layer 48 is formed by low-temperature CVDat a deposition temperature of about 100 {hacek over (Z)}, for example.Alternatively, the sealing layer 48 may be formed by attaching a resinfilm having a moisture-proof layer formed therein.

Accordingly, a flexible organic EL display 1 d according to the fifthembodiment of the present invention is completed.

As described above, in the method of manufacturing a flexible displayaccording to this embodiment, a patterning step (the step of forming thesource electrodes 24 a and 24 x, the drain electrodes 24 b and 24 y, thepixel electrode 26, the gate electrodes 30 a and 30 b, and the via holes32 x and 32 y) by photolithography which adversely affects the organicactive layers 36 a and 36 b and the organic EL layer 3 is performed onthe glass substrate 20 before the organic active layers 36 a and 36 band the organic EL layers 3 are formed. Furthermore, the organic activelayers 36 a and 36 b, which are connected to the source electrodes 24 aand 24 x and the drain electrodes 24 b and 24 y, and the barrierinsulating layer 37, which covers the organic active layers 36 a and 36b, are formed on the glass substrate 20. Thus, a transfer layer isobtained. Subsequently, after the transfer layer is transferred in astate of being inverted upside down on the plastic film 40, the organicEL element 2 is formed on a pixel electrode 26 by the mask vapordeposition.

By adopting the manufacturing method as described above, there is nolonger a risk that characteristics of the organic active layers 36 a and36 b and the organic EL layer 3 are deteriorated by various processingin the photolithography step. Moreover, after the transfer layer istransferred onto the plastic film 40 (the state shown in FIG. 9L), thesource electrodes 24 a and 24 x, the drain electrodes 24 b and 24 y, andthe pixel electrode 26 are exposed to the top. Moreover, the organicactive layers 36 a and 36 b are set in the state of being buried in thebottom, Thus, even if the photolithography step is performed after thetransfer and before formation of the organic EL element 2 (the stepbetween FIG. 9L and FIG. 9M), there is no risk that the organic activelayers 36 a and 36 b are damaged.

Therefore, it is possible to pattern, by photolithography, an insulatinglayer which covers the Sw-TFT 5 and the Dr-TFT 6 and has an opening onthe pixel electrode 26. Thus, even in the case where the metal electrode46 of the organic EL element 2 is formed on the entire surface over theplastic film 40, a degree of freedom for designing of the organic ELdisplay can be increased without causing any trouble.

As described above, in this embodiment, it is made possible to stablymanufacture, with high yield, an organic EL display which uses a plasticfilm as a substrate and includes organic TFTs. Furthermore, the barrierinsulating layer 37 which can block water vapor is formed below theorganic active layers 36 a and 36 b. Thus, water vapor from the outsideair and moisture in the plastic film 40 are prevented from entering theorganic active layers 36. Consequently, a highly reliable organic ELdisplay can be realized.

FIG. 10 shows pixel parts of three primary colors (a red pixel part (R),a green pixel part (G) and a blue pixel part (B)) in the flexibledisplay of the fifth embodiment. As shown in FIG. 10, in the flexibleorganic EL display 1 d of the fifth embodiment, the plastic film 40 isused as a substrate, and the barrier insulating layer 37 is formedthereon with the adhesive layer 34 interposed therebetween. On thebarrier insulating layer 37 in the respective pixel parts (R), (G) and(B) of the three primary colors, the organic active layers 36 a of theSw-TFTs 5 and the organic active layers 36 b of the Dr-TFTs 6 areformed, respectively. Moreover, on the respective organic active layers36 a and 36 b in the respective pixel parts (R), (G) and (B) of thethree primary colors, the gate insulating layer 32 and the gateelectrodes 30 a and 30 b are formed. Furthermore, on the respective gateelectrodes 30 a and 30 b, the protective layer 28 is formed.

Moreover, on the protective layer 28 in the respective pixel parts (R),(G) and (B) of the three primary colors, the source and drain electrodes24 a and 24 b for the Sw-TFTs 5, the source and drain electrodes 24 xand 24 y for the Dr-TFTs 6, and the pixel electrodes 26 electricallyconnected to the drain electrodes 24 y for the Dr-TFTs 6 are formed,respectively.

The organic active layers 36 a of the respective Sw-TFTs 5 in therespective pixel parts (R), (G) and (B) of the three primary colors areelectrically connected to the source and drain electrodes 24 a and 24 bfor the Sw-TFTs 5, respectively, through the first via holes 32 xprovided in the gate insulating layer 32 and the protective layer 28.Moreover, similarly, the organic active layers 36 b of the respectiveDr-TFTs 6 are electrically connected to the source and drain electrodes24 x and 24 y for the Dr-TFTs 6, respectively, through the second viaholes 32 y provided in the gate insulating layer 32 and the protectivelayer 28.

Thus, the Sw-TFTs 5 and the Dr-TFTs 6 are disposed in the respectivepixel parts (R), (G) and (B) of the three primary colors, respectively,the TFTs including the source electrodes 24 a and 24 x, the drainelectrodes 24 b and 24 y, the gate electrodes 30 a and 30 b, the gateinsulating layer 32 and the organic active layers 36 a and 36 b.

Moreover, on the respective pixel electrodes 26 in the respective pixelparts (R), (G) and (B) of the three primary colors, the organic ELlayers 3 formed of the hole transport layers 38, emitting layers 42R,42G and 42B, and the electron transport layers 44 are formed,respectively. The red emitting layer 42R, the green emitting layer 42Gand the blue emitting layer 42B are provided so as to correspond to therespective pixel parts (R), (G) and (B) of the three primary colors.

Furthermore, the metal electrodes 46 are formed, respectively, on theorganic EL layers 3 in the respective pixel parts (R), (G) and (B) ofthe three primary colors. In the respective pixel parts (R), (G) and(B), the organic EL elements 2 formed of the pixel electrodes 26, theorganic EL layers 3 and the metal electrodes 46 are provided,respectively. On the organic EL elements 2, the Dr-TFTs 6 and theSw-TFTs 5, the sealing layer 48 which covers the elements and the TFTsis formed.

In the flexible display 1 d of the fifth embodiment, one pixel part isprovided with the same configuration as that shown in the plan view ofFIG. 4 so as to form the equivalent circuit shown in FIG. 3 in the firstembodiment described above. Moreover, lights of predetermined colors areemitted to the outside from the respective emitting layers 42R, 42G and42B in the respective pixel parts (R), (G) and (B). Thus, a color imageis obtained (the direction indicated by the arrows in FIG. 10).

Note that, in the fifth embodiment described above, as in the case of asixth embodiment to be described next, color filter layers may beprovided between the protective layer 28 and the gate insulating layer32 or between the gate insulating layer 32 and the barrier insulatinglayer 37. In this case, a full' color display is realized by combinationof the color filter layers and the light emission of red (R), green (G)and blue (B). Thus, color saturation can be improved.

Sixth Embodiment

FIG. 11 is a cross-sectional view showing a flexible display (an organicEL display) according to a sixth embodiment of the present invention. Inthe sixth embodiment, a full-color display is realized by using a whiteemitting layer as an emitting layer in an organic EL layer and combiningcolor filter layers. In FIG. 11, the same components as those of thefifth embodiment shown in FIG. 10 are denoted by the same referencenumerals, and description thereof will be omitted.

As shown in FIG. 11, a flexible organic EL display 1 e of the sixthembodiment is formed by replacing all the red, green and blue emittinglayers 42R, 42G and 42B in the fifth embodiment shown in FIG. 10 withwhite emitting layers 42. Moreover, between a protective layer 28 and agate insulating layer 32 in respective pixel parts (R), (G) and (B) ofthree primary colors, color filter layers 52R, 52G and 52B are formed,respectively. The color filter layers include a red color filter layer52R formed in a red pixel part (R), a green color filter layer 52Gformed in a green pixel part (G), and a blue color filter layer 52Bformed in a blue pixel part (B). In the sixth embodiment, white light isemitted from the white emitting layers 42 in the respective pixel parts(R), (G) and (B). Thereafter, the white light passes through the colorfilter layers 52R, 52G and 52B of the three primary colors. Thus, acolor image is obtained (the direction indicated by the arrows in FIG.11).

In order to manufacture the flexible display 1 e of the sixthembodiment, the red, green and blue color filter layers 52R, 52G and 52Bare sequentially formed on the protective layer 28 on respective pixelelectrodes 26 corresponding to the pixel parts (R), (G) and (B) of thethree primary colors after the step of FIG. 9D in the fifth embodiment.The respective color filter layers 52R, 52G and 52B are formed bypatterning photosensitive coating films of a pigment dispersion type,for example, by photolithography. Note that the color filter layers 52R,52G and 52B may be formed at any stage as long as the layers are formedbefore the organic active layers 36 a and 36 b are formed. Therefore,the color filter layers 52R, 52G and 52B may be formed between the gateinsulating layer 32 and the barrier insulating layer 37.

The flexible organic EL display 1 e of the sixth embodiment achieves thesame effects as those of the fifth embodiment.

Seventh Embodiment

FIGS. 12A to 12L are cross-sectional views showing a method ofmanufacturing a flexible display according to a seventh embodiment ofthe present invention. FIG. 13 is a cross' sectional view showing aflexible display according to the seventh embodiment of the presentinvention. In the fifth embodiment, the organic active layers and theorganic EL layers are formed by the mask vapor deposition. Meanwhile, inthe seventh embodiment, organic active layers and organic EL layers areformed by use of an ink jet method or printing. In the seventhembodiment, detailed description of the same steps as those of the fifthembodiment will be omitted.

First, as shown in FIG. 12A, after a peelable layer 22 is formed on aglass substrate 20, a mask metal layer 25 having an opening 25 xprovided in a required portion is patterned on the peelable layer 22. Asa material of the mask metal layer 25, aluminum (Al), silver (Ag) or thelike is used. The opening 25 x of the mask metal layer 25 is provided ina portion corresponding to a region where a pixel electrode (an emittinglayer) for a TFT to be formed later is formed.

Next, as shown in FIG. 12B, after a coating film such as a polyimideresin is formed on the peelable layer 22 and the mask metal layer 25 byuse of a spin coating method, printing or the like, the coating film ishardened by heat treatment at a temperature of 200 to 300 Z. Thus, afirst organic insulating layer 27 a having a thickness of, for example,2 to 5 fÊm is obtained. As the first organic insulating layer 27 a,besides the polyimide resin, a material which can be etched by plasma ofgas consisting mainly of oxygen gas, such as a PMMA (polymethylmethacrylate) resin and an acrylic resin, is used. In this embodiment,formation of the first organic insulating layer 27 a, which involvesheat treatment, is performed on the glass substrate 20. Thus, a plasticfilm to be a substrate at the end is never thermally deformed.

Subsequently, as shown in FIG. 12C, the steps of FIGS. 9D to 9G in thefifth embodiment are performed. Thus, as in the case of the fifthembodiment, source electrodes 24 a and 24 x, drain electrodes 24 b and24 y, a pixel electrode 26 connected to the drain electrode 24 y, aprotective layer 28, gate electrodes 30 a and 30 b, and a gateinsulating layer 32 are sequentially formed on the organic insulatinglayer 27 a. Thereafter, first and second via holes 32 x and 32 y areformed, the via holes having depths that reach the source electrodes 24a and 24 x and the drain electrodes 24 b and 24 y.

Next, as shown in FIG. 12D, a second organic insulating layer pattern39, which has openings 39 x provided in portions where organic activelayers are formed, is formed on the gate insulating layer 32. The secondorganic insulating layer pattern 39 having the openings 39 x providedtherein may be formed by patterning photosensitive polyimide.Alternatively, the second organic insulating layer pattern 39 may beformed by patterning various resins (a polyimide resin, a PMMA resin oran acrylic resin) by use of the mask metal layer, as described in a stepof forming a first organic resin layer pattern 27 to be described later.

Thereafter, the upper surface of the structure shown in FIG. 12D isprocessed by use of plasma of gas containing fluorine atoms, such asCF₄. Thus, a surface of the second organic insulating layer pattern 39is set to be water-repellent, and exposed portions of the sourceelectrodes 24 a and 24 x and the drain electrodes 24 b and 24 y exposedin the via holes 32 x and 32 y are set to be hydrophilic.

Next, as shown in FIG. 12E, a coating liquid 35 for forming organicactive layers of TFTs is applied from a nozzle 31 of an ink jetapparatus (not shown) into the openings 39 x of the second organicinsulating layer pattern 39. Thus, coating films are formed. In thisevent, the coating liquid 35 fills the first and second via holes 32 xand 32 y and formed on the gate insulating layer 32 in the openings 39 xof the second organic insulating layer pattern 39. Furthermore, thecoating films are baked at a temperature of 100 to 200 {hacek over (Z)}to be dried. Thus, an organic active layer 36 a for a Sw-TFT and anorganic active layer 36 b for a Dr-TFT are obtained. As the coatingliquid 35 for forming the organic active layers 36 a and 36 b, onecontaining an organic semiconductor material such as pentacene,sexithiophene and poly thiophene, which are described in the fifthembodiment, is used. In this event, since the surface of the secondorganic insulating layer pattern 39 is set to be water-repellent, evenif the nozzle 31 of the ink jet apparatus is slightly shifted from theopenings 39 x of the second organic insulating layer pattern 39, thecoating liquid 35 flows toward the openings 39 x to be accumulatedtherein. Thus, a Sw-TFT 5 and a Dr-TFT 6 are obtained, both of whichhave the same structures as those of the fifth embodiment.

Next, as shown in FIG. 12F, a barrier insulating layer 37 is formed, thebarrier insulating layer covering the organic active layers 36 a and 36b, as in the case of the fifth embodiment.

Subsequently, as shown in FIG. 12G, by use of the same method as that ofthe fifth embodiment, a plastic film 40 is attached to an upper surfaceof the barrier insulating layer 37 shown in FIG. 12F with an adhesivelayer 34 interposed therebetween. Thereafter, the glass substrate 20 ispeeled while a roll 29 fixed to one end of the plastic film 40 is beingrotated. In this event, the glass substrate 20 is peeled along aninterface (the portion A in FIG. 12G) between the glass substrate 20 andthe peelable layer 22, and is discarded.

Thus, as shown in FIG. 12H, on the plastic film 40, the adhesive layer34, the barrier insulating layer 37, the organic active layers 36 a and36 b and the second organic insulating layer pattern 39, the gateinsulating layer 32, the gate electrodes 30 a and 30 b, the protectivelayer 28, the source electrodes 24 a and 24 x, the drain electrodes 24 band 24 y and the pixel electrode 26, the first organic insulating layer27 a, the mask metal layer 25, and the peelable layer 22 are transferredand formed sequentially from the bottom.

Thereafter, as shown in FIG. 12I, the peelable layer 22 is removed byuse of oxygen gas plasma, and the first organic insulating layer 27 a isetched by using the exposed mask metal layer 25 as a mask and using theoxygen gas plasma. Thus, a first organic insulating layer pattern 27having an opening 27 x provided therein is obtained. By using oxygen gasplasma in an isotropic etching device, the first organic insulatinglayer 27 a (the polyimide resin or the PMMA resin) is isotropicallyetched from the mask metal layer 25. Thus, the first organic insulatinglayer pattern 27 having the opening 27 x in a forward tapered shape (ashape which gets gradually wider toward its bottom) is obtained. In thisembodiment, it is possible toobtain the first organic insulating layerpattern 27 having a forward tapered shape with a tapered angle ƒ

(FIG. 12 l) of 60< or less (preferably 60< to 30<).

Note that, in the case where the acrylic resin is used as the firstorganic insulating layer 27 a, the layer is etched by use of plasma ofmixed gas obtained by adding gas containing fluorine atoms, such as CF₄,to oxygen gas by 2 to 5%.

Subsequently, as shown in FIG. 12J, the mask metal layer 25 isselectively removed with respect to the underlying layer. For example,in the case where an Al layer is used as the mask metal layer 25, wetetching using a solution containing phosphoric acid is adopted. Thus,the mask metal layer 25 is removed without damaging the pixel electrode26 and the like.

Thus, the first organic insulating layer pattern 27 having the forwardtapered shape is exposed and formed in a state where the opening 27 x isprovided on the pixel electrode 26.

Thereafter, the upper surface of the structure shown in FIG. 12J isexposed to plasma of gas containing fluorine atoms (CF₄, SF₆, CHF₃ orthe like). Thus, adhesion of the fluorine atoms to an upper surface andsides of the first organic insulating layer pattern 27 allows thepattern to have water repellency for repelling liquids. At the sametime, the exposed surface of the pixel electrode 26 becomes hydrophilic.

Note that, in the above described steps of patterning the first organicinsulating layer 27 a by use of the oxygen plasma, removing the maskmetal layer 25 with chemicals, and plasma processing with fluorine gas,the organic active layers 36 a and 36 b exist at the bottom. However,the organic active layers 36 a and 36 b are protected by the pixelelectrode 26, the source electrodes 24 a and 24 x, and the drainelectrodes 24 b and 24 y. Thus, there is no risk that the organic activelayers 36 a and 36 b are damaged by the processing described above.

Subsequently, as shown in FIG. 12K, a coating liquid 33 of a thiopheneconductive polymer (PEDOT/PSS) is applied from the nozzle 31 of the inkjet apparatus (not shown) to the surface of the pixel electrode 26 inthe opening 27 x of the first organic insulating layer pattern 27.Thereafter, the coating liquid is baked at a temperature of 100 to 200{hacek over (Z)} to be dried. Thus, a hole transport layer 38 is formed.

Furthermore, as also shown in FIG. 12K, by use of the same ink jetmethod, a coating liquid 33 for forming an emitting layer is applied tothe hole transport layer 38 in the opening 27 x of the first organicinsulating layer pattern 27. Thereafter, the coating liquid is baked ata temperature of 100 to 200 {hacek over (Z)} to be dried. Thus, anemitting layer 42 is formed. Note that, although FIG. 12K shows only onepixel part, as in the case of the fifth embodiment, a red emittinglayer, a green emitting layer and a blue emitting layer are formed,respectively, on the hole transport layers 38 in the respective pixelparts (R), (G) and (B) of the three primary colors.

As materials of the emitting layers for forming the emitting layers ofthe three primary colors, there are afI-conjugated polymer emittingmaterial and a pigment“containing polymer emitting materiaL To be morespecific, as the fI-conjugated polymer emitting material, there arepolyfluorene (PF) dielectrics (red, green and blue), poly-spirodielectrics (red, green and blue), polyparaphenylene dielectrics,polythiophene dielectrics, and the like.

Meanwhile, as the pigment-containing polymer emitting material, thereare: a pigment dispersion PVK (red, green and blue) that is an emittingmaterial obtained by dispersing a phosphorescent or fluorescent low“molecular-weight pigment in polyvinylcarbazole (PVK); and a side-chainintegration PVK (red, green and blue) that is a phosphorescent polymerin which a phosphorescent base such as Ir(ppy)₃ is integrated with aside chain of PVK.

The materials described above are dissolved in a solvent such as xylene,toluene, chloroform, anisole, tetradecane, dichloroethane,chlorobenzene, benzene and dichlorobenzene. Accordingly, coating liquids(ink) for forming the emitting layers of the respective colors areprepared.

Thus, an organic EL layer 3 a is obtained, the organic EL layerincluding the hole transport layer 38 and the emitting layer 42. Notethat, as in the case of the fifth embodiment, an electron transportlayer may be further formed on the emitting layer 42 or only one of thehole transport layer 38 and the electron transport layer may be formed.Alternatively, both of the hole transport layer 38 and the electrontransport layer may be omitted.

In the seventh embodiment, the organic EL layer 3 a is formed by use ofthe ink jet method. Thus, as in the case of the fifth embodiment, thereis no risk that performance of the organic EL layer 3 a is deterioratedby various processing in the photolithography step.

Moreover, when the hole transport layer 38 and the emitting layer 42 areformed by use of the ink jet method, since the surface of the firstorganic insulating layer pattern 27 is set to be water-repellent, thehole transport layer 38 and the emitting layer 42 are formed so as to bepositioned in a self-alignment manner in the opening 27 x of the firstorganic insulating layer pattern 27.

Note that the organic EL layer 3 a may be formed by screen printinginstead of the ink jet method.

Next, as shown in FIG. 12L, a metal electrode 46, such as acalcium/aluminum (Ca/Al) laminated film, a barium (Ba) film and abarium/aluminum (Ba/Al) laminated film, is formed on the emitting layer42 by mask vapor deposition. Thus, an organic EL element 2 a isobtained, the organic EL element including the pixel electrode 26, theorganic EL layer 3 a and the metal electrode 46. Note that, since thefirst organic insulating layer pattern 27 is formed on the Sw-TFT 5 andthe Dr-TFT 6, the metal electrode 46 may be formed on the entiresurface.

Thereafter, as shown in FIG. 13, a sealing layer 48 which covers theorganic EL element 2 a is formed, as in the case of the fifthembodiment.

Thus, a flexible organic EL display 1 f of the seventh embodiment iscompleted.

As shown in FIG. 13, in the flexible organic EL display 1 f of theseventh embodiment, the plastic film 40 is used as a substrate, and thebarrier insulating layer 37 is formed thereon with the adhesive layer 34interposed therebetween. Moreover, in the openings 39 x of the secondorganic insulating layer pattern 39 on the barrier insulating layer 37,the organic active layer 36 a of the Sw-TFT 5 and the organic activelayer 36 b of the Dr-TFT 6 are formed. The second organic insulatinglayer pattern 39 functions as a partition wall in formation of theorganic active layers 36 a and 36 b by use of the ink jet method.Accordingly, the organic active layers 36 a and 36 b are disposed withhigh alignment accuracy. On the respective organic active layers 36 aand 36 b, the gate insulating layer 32, the gate electrode 30 a of theSw-TFT 5 and the gate electrode 30 b of the Dr-TFT 6 are sequentiallyformed. Moreover, on the respective gate electrodes 30 a and 30 b, theprotective layer 28 is formed.

On the protective layer 28, formed are the source and drain electrodes24 a and 24 b for the Sw-TFT 5, the source and drain electrodes 24 x and24 y for the Dr-TFT 6, and the pixel electrode 26 electrically connectedto the drain electrode 24 y for the Dr-TFT 6. Furthermore, therespective organic active layers 36 a and 36 b are electricallyconnected to the source electrodes 24 a and 24 x and the drainelectrodes 24 b and 24 y, respectively, through the first and second viaholes 32 x and 32 y provided in the gate insulating layer 32 and theprotective layer 28.

Thus, as in the case of the fifth embodiment, the Sw-TFT 5 and theDr-TFT 6 are formed, the TFTs including the source electrodes 24 a and24 x, the drain electrodes 24 b and 24 y, the gate electrodes 30 a and30 b, the gate insulating layer 32, and the organic active layers 36 aand 36 b.

Furthermore, the first organic insulating layer pattern 27 having theopening 27 x provided on the pixel electrode 26 is formed above theSw-TFT 5 and the Dr-TFT 6. The first organic insulating layer pattern 27is formed to have a forward tapered shape with a tapered angle of 60< orless, and has a water-repellent surface.

Moreover, on the pixel electrode 26 in the opening 27 x of the firstorganic insulating layer pattern 27, the hole transport layer 38 and theemitting layer 42 are formed. As in the case of FIG. 10 of the fifthembodiment, a plurality of the pixel electrodes 26 are set in a red (R)pixel part, a green (G) pixel part and a blue (B) pixel part. Moreover,red, green and blue emitting layers (not shown) are formed so as tocorrespond to the pixel parts of the respective colors. Furthermore, thehole transport layer 38 and the emitting layer 42 form the organic ELlayer 3 a. The organic EL layer 3 a is formed with high accuracy in eachof the pixel parts of the three primary colors while being defined bythe first organic insulating layer pattern 27 which functions as apartition wall in formation of the layer by use of the ink jet method.

Moreover, the metal electrode 46 is formed on the organic EL layer 3 a,and the organic EL element 2 a is formed of the pixel electrode 26, theorganic EL layer 3 a and the metal electrode 46. Furthermore, thesealing layer 48 which covers the organic EL element 2 a is formed.

The flexible organic EL display If of the seventh embodiment has theconfiguration as described above. As in the case of the fifthembodiment, lights of predetermined colors are emitted to the outsidefrom the emitting layers 42 of the respective colors. Thus, a colorimage is obtained (the direction indicated by the arrows in FIG. 13).

In the seventh embodiment, as in the case of the fifth embodiment, apatterning step (the step of forming the source electrodes 24 a and 24x, the drain electrodes 24 b and 24 y, the pixel electrode 26, the gateelectrodes 30 a and 30 b, and the via holes 32 x and 32 y) byphotolithography which adversely affects the organic active layers 36 aand 36 b and the organic EL layer 3 a is performed on the glasssubstrate 20 before the organic active layers 36 a and 36 b and theorganic EL layer 3 a are formed. Furthermore, after the organic activelayers 36 a and 36 b, which are connected to the source electrodes 24 aand 24 x and the drain electrodes 24 b and 24 y, are formed on the glasssubstrate 20 by use of the ink jet method, the barrier insulating layer37 which covers the organic active layers 36 a and 36 b is formed. Thus,a transfer layer is obtained. Subsequently, after the transfer layer istransferred in a state of being inverted upside down on the plastic film40, the organic EL layer 3 a is formed on the pixel electrode 26 by useof the ink jet method. Therefore, as in the case of the fifthembodiment, there is no longer a risk that the organic active layers 36a and 36 b and the organic EL layer 3 a are deteriorated by variousprocessing in the photolithography step.

As described above, in the seventh embodiment, as in the case of thefifth embodiment, it is made possible to stably manufacture, with highyield, a flexible organic EL display which uses a plastic film as asubstrate and includes organic TFTs.

Eighth Embodiment

FIGS. 14A to 14J are cross sectional views showing a method ofmanufacturing a flexible display according to an eighth embodiment ofthe present invention. FIG. 15 is a cross sectional view showing aflexible display according to the eighth embodiment of the presentinvention.

The eighth embodiment is different from the fifth embodiment in having adifferent TFT structure. In FIGS. 14A to 14J and FIG. 15, the samecomponents as those of the fifth embodiment are denoted by the samereference numerals, and detailed description of materials and formationmethods thereof will be omitted.

In the method of manufacturing a flexible display according to theeighth embodiment of the present invention, as shown in FIG. 14A, first,a peelable layer 22 is formed on a glass substrate 20 by use of the samemethod as that of the fifth embodiment. Thereafter, a gate electrode 30a for a Sw-TFT and a gate electrode 30 b for a Dr-TFT are formed.Subsequently, as shown in FIG. 14B, gate insulating layers 32 areformed, the gate insulating layers covering upper surfaces and sides ofthe gate electrodes 30 a and 30 b.

Subsequently, as shown in FIG. 14C, source and drain electrodes 24 a and24 b for the Sw-TFT and source and drain electrodes 24 x and 24 y forthe Dr-TFT are formed on the respective gate insulating layers 32 so asto be extended to sides of the gate insulating layers 32 from both endsthereof. Furthermore, a pixel electrode 26 electrically connected to thedrain electrode 24 y for the Dr-TFT is formed on the peelable layer 22.

Next, as shown in FIG. 14D, an organic active layer 36 a for the Sw-TFT,which is electrically connected to the source and drain electrodes 24 aand 24 b for the SW-TFT, is formed on the source and drain electrodes 24a and 24 b. At the same time, an organic active layer 36 b for theDr-TFT, which is electrically connected to the source and drainelectrodes 24 x and 24 y for the Dr-TFT, is formed on the source anddrain electrodes 24 x and 24 y. As in the case of the fifth embodiment,the organic active layers 36 a and 36 b are formed by mask vapordeposition. Thus, there is no risk that performance of the organicactive layers 36 a and 36 b is deteriorated by wet processing, plasmaand the like in the photolithography step.

Accordingly, a Sw-TFT 5 is obtained, the Sw-TFT including the gateelectrode 30 a, the gate insulating layer 32, the source electrode 24 a,the drain electrode 24 b and the organic active layer 36 a connected tothe source and drain electrodes 24 a and 24 b. Moreover, a Dr-TFT 6 isobtained, the Dr-TFT including the gate electrode 30 b, the gateinsulating layer 32, the source electrode 24 x, the drain electrode 24 yand the organic active layer 36 b connected to the source and drainelectrodes 24 x and 24 y.

Next, as shown in FIGS. 14E and 14F, a protective layer 28 is formed onthe Sw-TFT 5 and the Dr-TFT 6 to fill in gaps and obtain a flat surface.Thereafter, a barrier insulating layer 37 is formed on the protectivelayer 28.

Subsequently, as shown in FIG. 14G, a plastic film 40 is attached to anupper surface of the barrier insulating layer 37 shown in FIG. 14F withan adhesive layer 34 interposed therebetween. Subsequently, as alsoshown in FIG. 14G, a roll 29 is fixed to one end of the plastic film 40,and the glass substrate 20 is peeled while the roll 29 is rotated. Inthis event, the glass substrate 20 is peeled along an interface (theportion A in FIG. 14G) between the glass substrate 20 and the peelablelayer 22, and is discarded.

Thus, as shown in FIG. 14H, on the plastic film 40, the adhesive layer34, the barrier insulating layer 37, the protective layer 28, theorganic active layers 36 a and 36 b, the source electrodes 24 a and 24 xand the drain electrodes 24 b and 24 y, the gate insulating layer 32,the gate electrodes 30 a and 30 b, the pixel electrode 26 connected tothe drain electrode 24 y of the Dr-TFT 6, and the peelable layer 22 aretransferred and formed sequentially from the bottom in a state of beinginverted upside down.

Thereafter, as shown in FIG. 14I, the peelable layer 22 is removed toexpose upper surfaces of the gate electrodes 30 a and 30 b and the pixelelectrode 26.

Also in the eighth embodiment, adopted is the method of transferring andforming the respective TFTs 5 and 6 in a state of being inverted upsidedown on the plastic film 40 after the TFTs are formed to have astructure in which the organic active layers 36 a and 36 b are disposedon the upper side on the glass substrate 20. Therefore, the organicactive layers 36 a and 36 b are never exposed to the upper side of theplastic film 40 but are set in a state of being buried in the bottom.Thus, there is no longer a risk that the organic active layers 36 a and36 b are damaged by the subsequent various processing steps.

Subsequently, as shown in FIG. 14J, a hole transport layer 38, anemitting layer 42, an electron transport layer 44 and a metal electrode46 are sequentially formed on the pixel electrode 26 by mask vapordeposition. Thus, an organic EL layer 3 is obtained, the organic ELlayer including the hole transport layer 38, the emitting layer 42 andthe electron transport layer 44. At the same time, an organic EL element2 is obtained, the organic EL element including the pixel electrode 26,the organic EL layer 3 and the metal electrode 46.

As described above, in this embodiment, photolithography is not used inthe step of forming the organic active layers 36 a and 36 b and theorganic EL layer 3 and in the subsequent steps. Thus, there is no riskthat performance of the organic active layers 36 a and 36 b and theorganic EL layer 3 is deteriorated by various processing in thephotolithography step.

Thereafter, as shown in FIG. 15, a sealing layer 48 is formed, thesealing layer covering the organic EL element 2, the SW-TFT 5 and theDr-TFT 6. Accordingly, a flexible organic EL display 19 according to theeighth embodiment of the present invention is completed.

As shown in FIG. 15, in the flexible display 19 of the eighthembodiment, the adhesive layer 34, the barrier insulating layer 37 andthe protective layer 28 are sequentially formed on the plastic film 40.In the protective layer 28, the SW-TFT 5 and the Dr-TFT 6 are buried andformed. The SW-TFT 5 and the Dr-TFT 6 have configurations in which theorganic active layers 36 a and 36 b, the source electrodes 24 a and 24 xand the drain electrodes 24 b and 24 y, the gate insulating layers 32,and the gate electrodes 30 a and 30 b are sequentially formed from thebottom.

The source electrodes 24 a and 24 x and the drain electrodes 24 b and 24y are formed so as to be extended upward from between both ends of theorganic active layers 36 a and 36 b and the gate insulating layers 32,respectively. Furthermore, the pixel electrode 26 electrically connectedto the drain electrode 24 y of the Dr-TFT 6 is buried in the protectivelayer 28. Accordingly, respective upper surfaces of the gate electrodes30 a and 30 b and the pixel electrode 26 are set to be the same surfaceas the upper surface of the protective layer 28.

Moreover, as in the case of the fifth embodiment, the organic EL layer 3is formed on the pixel electrode 26, and the metal electrode 46 isformed thereon. Thus, the organic EL element 2 is formed. Furthermore,the organic EL element 2 is covered with the sealing layer 48.

Also in the eighth embodiment, a full color display may be realized byusing emitting layers of three primary colors as in the case of thefifth embodiment or by using white emitting layers and combining colorfilters as in the case of the sixth embodiment.

Moreover, as in the case of the seventh embodiment, the organic activelayers and the organic EL layers may be formed by use of the ink jetmethod or printing. In the case where the organic active layers 36 a and36 b are formed by use of the ink jet method, an organic insulatinglayer having openings provided in portions where those layers are formedmay be formed before the organic active layers 36 a and 36 b are formed,as in the case of the seventh embodiment. Moreover, if the organic ELlayer 3 is formed by use of the ink jet method, as in the case of theseventh embodiment, after the peelable layer 22 is formed (before thegate electrodes 30 a and 30 b are formed), an organic insulating layeris formed after formation of a mask metal layer including an opening ina region where a pixel electrode is formed. Subsequently, aftertransferring onto a plastic film, the organic insulating layer may bepatterned by using the mask metal layer as a mask.

In the eighth embodiment, the structures of the TFTs 5 and 6 aredifferent from those of the fifth embodiment. However, the eighthembodiment achieves the same effects as those of the fifth embodiment.

Ninth Embodiment

FIGS. 16A to 16K are cross sectional views sequentially showing a methodof manufacturing a flexible display according to a ninth embodiment ofthe present invention. FIG. 17 is a cross-sectional view showing aflexible display (a liquid crystal display) according to the ninthembodiment of the present invention. In the ninth embodiment, the caseof applying the present invention to a liquid crystal display will bedescribed as an example. In the ninth embodiment, detailed descriptionof the same steps as those of the fifth embodiment will be omitted.Moreover, the same components as those of the fifth embodiment aredenoted by the same reference numerals, and description thereof will beomitted.

In the method of manufacturing a flexible display according to the ninthembodiment of the present invention, as shown in FIG. 16A, first, apeelable layer 22 is formed on a glass substrate 20 as a temporarysubstrate. Thereafter, source and drain electrodes 24 a and 24 b of aTFT for switching are formed on the peelable layer 22. Subsequently, apixel electrode 26, which is electrically connected to the drainelectrode 24 b and is made of ITO or the like, is formed on the peelablelayer 22.

Next, as shown in FIG. 16B, a protective layer 28 is formed, theprotective layer covering the source electrode 24 a, the drain electrode24 b and the pixel electrode 26. Thereafter, as shown in FIG. 16C, agate electrode 30 for the TFT, which is the same as that of the fifthembodiment, is formed on the protective layer 28 above a space betweenthe source and drain electrodes 24 a and 24 b so as to overlap aboveends thereof. Subsequently, a color filter layer 52 corresponding to thepixel electrode 26 is formed on the protective layer 28. In thisembodiment, description is given of the case where a full color displayis realized by using the color filter layer 52, as an example. AlthoughFIG. 16C shows only one pixel part, a red (R) color filter layer, agreen (G) color filter layer and a blue (B) color filter layer areformed, respectively, above the respective pixel electrodes 26 inrespective pixel parts (R), (G) and (B) of the three primary colors asshown in FIG. 10 of the fifth embodiment. The pixel parts (subpixels) ofthe three primary colors form a pixel that is a display unit. Therespective color filter layers 52 of the three primary colors are formedby sequentially patterning photosensitive coating films of a pigmentdispersion type, for example, by photolithography.

Subsequently, as shown in FIG. 16D, a gate insulating layer 32, whichcovers the gate electrode 30 and the color filter layer 52, is formed.Next, as shown in FIG. 16E, via holes 32 x are formed in portions of theprotective layer 28 and the gate insulating layer 32 on the source anddrain electrodes 24 a and 24 b. Furthermore, as shown in FIG. 16F, as inthe case of the fifth embodiment, an organic active layer is formed bymask vapor deposition, the organic active layer connected to the sourceand drain electrodes 24 a and 24 b through the via holes 32 x. As in thecase of the sixth embodiment, an organic insulating layer pattern havingan opening provided therein may be formed to form the organic activelayer 36 in the opening by use of the ink jet method.

Thus, a TFT 7 for switching is obtained, the TFT including the gateelectrode 30, the gate insulating layer 28, the source electrode 24 a,the drain electrode 24 b and the organic active layer 36. Thereafter, asshown in FIG. 16G, a barrier insulating layer 37 which covers theorganic active layer 36 is formed.

Next, as shown in FIG. 16H, a first plastic film 40 is attached to thebarrier insulating layer 37 shown in FIG. 16G with the adhesive layer 34interposed therebetween. Thereafter, the glass substrate 20 is peeledwhile a roll 29 fixed to one end of the first plastic film 40 is beingrotated. In this event, the glass substrate 20 is peeled along aninterface (the portion A in FIG. 16H) between the glass substrate 20 andthe peelable layer 22, and is discarded.

Thus, as shown in FIG. 16I, on the first plastic film 40, the adhesivelayer 34, the barrier insulating layer 37, the organic active layer 36,the gate insulating layer 32, the gate electrode 30 and the color filterlayer 52, the protective layer 28, the source and drain electrodes 24 aand 24 b and the pixel electrode 26, and the peelable layer 22 aretransferred and formed sequentially from the bottom.

Next, as shown in FIG. 16J, by removing the peelable layer 22, uppersurfaces of the source electrode 24 a, the drain electrode 24 b and thepixel electrode 26 are exposed.

Thereafter, as shown in FIG. 16K, an alignment film 54 a for aligningliquid crystal is formed on the source electrode 24 a, the drainelectrode 24 b and the pixel electrode 26. Thus, a TFT substrate 8 for aflexible liquid crystal display is obtained.

As shown in FIG. 16K, in the TFT substrate 8 for the flexible liquidcrystal display, the first plastic film 40 is used as a substrate, andthe adhesive layer 34 and the barrier insulating layer 37 aresequentially formed thereon. On the barrier insulating layer 37, theorganic active layer 36 and the gate insulating layer 32 for the TFT aresequentially formed.

Moreover, the gate electrode 30 for the TFT and the color filter layer52 are formed on the gate insulating layer 32, and the protective layer28 is formed thereon. Furthermore, the source and drain electrodes 24 aand 24 b for the TFT and the pixel electrode 26 connected to the drainelectrode 24 b are formed on the protective layer 28, and the alignmentfilm 54 a is provided thereon.

Next, as shown in FIG. 17, a counter substrate 9 for the TFT substrate 8is prepared. The counter substrate 9 is basically formed of a secondplastic film 40 a, a common electrode 58 which is formed thereon andmade of ITO or the like, and an alignment film 54 b formed thereon. In astate where a predetermined space is secured, by use of a spacer,between the TFT substrate 8 and the counter substrate 9, the bothsubstrates are attached so as to face each other by use of a seal member(not shown) which is provided in a peripheral part. Furthermore, liquidcrystal 70 is sealed between the TFT substrate 8 and the countersubstrate 9.

Thus, a flexible liquid crystal display 1 h of the ninth embodiment iscompleted.

Note that a TFT substrate including TFTs obtained by use of themanufacturing method of the eighth embodiment described above may beused. Moreover, the color filter layer 52 may be formed at any stage aslong as the layer is formed before the organic active layer 36 is formedafter the pixel electrode 26 is formed. Therefore, the color filterlayer 52 may be provided between the gate insulating layer 32 and thebarrier insulating layer 37. Alternatively, the color filter layer 52may be provided in the counter substrate 9.

Although not particularly shown in the drawings, a data bus line isconnected to the source electrode 24 a of the TFT 7, and a gate bus lineis connected to the gate electrode 30 of the TFT 7. At a predeterminedtiming, a gradation voltage is sequentially applied to the pixelelectrode 26 of each pixel from the gate bus line and the data bus linethrough the TFT 7. Thus, an image is displayed.

Also in the ninth embodiment, as in the case of the fifth embodiment, itis not required to perform a photolithography step after the organicactive layer 36 is formed. Thus, there is no longer a risk thatperformance of the organic active layer 36 is deteriorated by variousprocessing in the photolithography step.

Moreover, a main part of the organic active layer 36 is buried in andprovided on the plastic film 40 which is relatively distant from theliquid crystal 70 through the source electrode 24 a, the drain electrode24 b, the protective layer 28, the gate electrode 30 and the gateinsulating layer 32. Thus, it is possible to prevent deterioration incharacteristics due to influence of the liquid crystal 70. Furthermore,the barrier insulating layer 37 is formed below the organic active layer36 (on the plastic film). Thus, water vapor from the outside air andmoisture in the plastic film 40 are prevented from entering the organicactive layer 36 and the liquid crystal 70. Consequently, deteriorationin performance of the organic active layer 36 and the liquid crystal 70is prevented, and reliability of a flexible liquid crystal displayincluding organic TFTs can be improved. As described above, in the ninthembodiment, it is made possible to stably manufacture, with high yield,an active matrix flexible liquid crystal display which uses an elementsubstrate having organic TFTs formed on a plastic film.

Note that the present invention can also be applied to a flexibleelectrophoretic display, besides the flexible organic EL display and theliquid crystal display.

1. An active matrix flexible display in which a TFT is provided for eachpixel, comprising: a plastic film; an adhesive layer formed on theplastic film; a protective layer formed on the adhesive layer; a gateelectrode for the TFT, which is buried in the protective layer; a gateinsulating layer for the TFT, which covers the gate electrode; sourceand drain electrodes for the TFT, which are formed on the gateinsulating layer and disposed at predetermined intervals on the gateelectrode; a pixel electrode which is formed on the gate insulatinglayer and is electrically connected to the drain electrode; an organicactive layer for the TFT, which is formed on a space between the sourceand drain electrodes and is electrically connected to the source anddrain electrodes; an organic EL layer, which includes an emitting layer,formed on the pixel electrode of each pixel; a metal electrode formed onthe organic EL layer; and a sealing layer which covers the metalelectrode.
 2. The flexible display according to claim 1, wherein thepixel is set in a red pixel part, a green pixel part and a blue pixelpart, and the emitting layer includes a red (R) emitting layer formed inthe red pixel part, a green (G) emitting layer formed in the green pixelpart and a blue (B) emitting layer formed in the blue pixel part.
 3. Theflexible display according to claim 1, wherein the emitting layer is awhite emitting layer, and a color filter layer buried in the adhesivelayer is formed between the adhesive layer and the protective layer. 4.The flexible display according to claim 1, wherein upper surfaces of thesource and drain electrodes are formed so as to be in plane with anupper surface of the gate insulating layer.
 5. The flexible displayaccording to claim 1, further comprising an organic insulating layerpattern which is formed on the source and drain electrodes and hasopenings provided on a space between the source and drain electrodes andon the pixel electrode, respectively, wherein the organic active layeris formed in the opening of the organic insulating layer pattern on thespace between the source and drain electrodes, and the organic EL layeris formed in the opening of the organic insulating layer pattern on thepixel electrode.
 6. The flexible display according to claim 5, whereinthe organic insulating layer pattern is made of anyone of a polyimideresin, a PMMA resin and an acrylic resin.
 7. The flexible displayaccording to claim 1, wherein the TFTs include a switching TFT and adriving TFT connected to the switching TFT, and the drain electrode ofthe driving TFT is connected to the pixel electrode.
 8. The flexibledisplay according to claim 1, wherein the organic EL layer is composedof the emitting layer and at least one of a hole transport layer, whichis formed between the pixel electrode and the emitting layer, and anelectron transport layer, which is formed between the emitting layer andthe metal electrode.
 9. An active matrix flexible display in which a TFTis provided for each pixel, comprising: a TFT substrate including afirst plastic film, an adhesive layer formed on the first plastic film,a protective layer formed on the adhesive layer, a gate electrode forthe TFT, which is buried in the protective layer, a gate insulatinglayer for the TFT, which covers the gate electrode, source and drainelectrodes for the TFT, which are formed on the gate insulating layerand disposed at predetermined intervals on the gate electrode, a pixelelectrode which is formed on the gate insulating layer and iselectrically connected to the drain electrode, an organic active layerfor the TFT, which is formed on a space between the source and drainelectrodes and is electrically connected to the source and drainelectrodes, and a first alignment film formed above the pixel electrodeand the organic active layer; a counter substrate including a secondplastic film, a common electrode formed on the second plastic film, anda second alignment film formed on the common electrode; and liquidcrystal sealed between the TFT substrate and the counter substrate. 10.The flexible display according to claim 9, wherein a color filter layeris further formed between the adhesive layer and the protective layer.11. The flexible display according to claim 1, wherein the organicactive layer is made of anyone of pentacene, sexithiophene and polythiophene.
 12. A method of manufacturing an active matrix flexibledisplay in which a TFT is provided for each pixel, comprising the stepsof: forming a peelable layer on a temporary substrate; forming sourceand drain electrodes for the TFT on the peelable layer, and forming apixel electrode electrically connected to the drain electrode; forming agate insulating layer for the TFT, which covers the source electrode,the drain electrode and the pixel electrode; forming a gate electrodefor the TFT in a portion on the gate insulating layer on a space betweenthe source and drain electrodes; forming a protective layer which coversthe gate electrode; attaching a plastic film to the protective layerwith an adhesive layer interposed therebetween; peeling the temporarysubstrate from an interface with the peelable layer, and transferringthe peelable layer, the source electrode, the drain electrode, the pixelelectrode, the gate insulating layer, the gate electrode and theprotective layer onto the plastic film; exposing upper surfaces of thesource electrode, the drain electrode and the pixel electrode byremoving the peelable layer; forming an organic active layer for theTFT, which is electrically connected to the source and drain electrodes,on the space between the source and drain electrodes; forming an organicEL layer, which includes an emitting layer, on the pixel electrode ofeach pixel before or after the organic active layer is formed; forming ametal electrode on the organic EL layer; and forming a sealing layerwhich covers the metal electrode.
 13. The method of manufacturing aflexible display, according to claim 12, wherein the pixel is set in ared pixel part, a green pixel part and a blue pixel part, and, in thestep of forming the emitting layer, a red (R) emitting layer is formedin the red pixel part, a green (G) emitting layer is formed in the greenpixel part and a blue (B) emitting layer is formed in the blue pixelpart.
 14. The method of manufacturing a flexible display, according toclaim 12, further comprising the step of forming a color filter layer onthe protective layer after the step of forming the protective layer,wherein a white emitting layer is formed as the emitting layer.
 15. Themethod of manufacturing a flexible display, according to claim 12,wherein the organic active layer and the organic EL layer are formed bymask vapor deposition in the steps of forming the organic active layerand forming the organic EL layer.
 16. The method of manufacturing aflexible display, according to claim 12, further comprising the stepsof: before the step of forming the pixel electrode, patterning a masklayer on the peelable layer; and forming an organic insulating layer onthe peelable layer and the mask layer, wherein the step of removing thepeelable layer includes formation of an organic insulating layerpattern, which has openings provided on a space between the source anddrain electrodes and on the pixel electrode, by etching the organicinsulating layer by use of the mask layer as a mask after the peelablelayer is removed, in the step of forming the organic active layer, theorganic active layer is formed in the opening of the organic insulatinglayer pattern on the space between the source and drain electrodes, byusing anyone of an ink jet method and printing, and in the step offorming the organic EL layer, the organic EL layer is formed in theopening of the organic insulating layer pattern on the pixel electrode,by using anyone of the ink jet method and printing.
 17. A method ofmanufacturing an active matrix flexible display in which a TFT isprovided for each pixel, comprising the steps of: (a) preparing a TFTsubstrate by use of a manufacturing method comprising the steps of:forming a peelable layer on a temporary substrate; forming source anddrain electrodes for the TFT on the peelable layer and forming a pixelelectrode electrically connected to the drain electrode; forming a gateinsulating layer for the TFT, which covers the source electrode, thedrain electrode and the pixel electrode; forming a gate electrode forthe TFT in a portion on the gate insulating layer on a space between thesource and drain electrodes; forming a protective layer which covers thegate electrode; attaching a first plastic film to the protective layerwith an adhesive layer interposed therebetween; peeling the temporarysubstrate from an interface with the peelable layer, and transferringthe peelable layer, the source electrode, the drain electrode, the pixelelectrode, the gate insulating layer, the gate electrode and theprotective layer onto the first plastic film; exposing upper surfaces ofthe source electrode, the drain electrode and the pixel electrode byremoving the peelable layer; forming an organic active layer for theTFT, which is electrically connected to the source and drain electrodes,on the space between the source and drain electrodes; and forming analignment film above the pixel electrode and the organic active layer;(b) attaching the TFT substrate to a counter substrate with apredetermined space therebetween, the counter substrate having astructure in which a common electrode and an alignment film are formedon a second plastic film; and (c) sealing liquid crystal between the TFTsubstrate and the counter substrate.
 18. The method of manufacturing aflexible display, according to claim 17, further comprising the step offorming a color filter layer on the protective layer before the step ofattaching the first plastic film after the step of forming theprotective layer.
 19. The method of manufacturing a flexible display,according to claim 12, wherein the organic active layer is made ofanyone of pentacene, sexithiophene and poly thiophene.
 20. An activematrix flexible display in which a TFT is provided for each pixel,comprising: a plastic film; an adhesive layer formed on the plasticfilm; a barrier insulating layer formed on the adhesive layer; a TFTwhich is formed on or above the barrier insulating layer and has astructure in which an organic active layer, a gate insulating layer anda gate electrode are formed sequentially .from the bottom, and sourceand drain electrodes are electrically connected to the organic activelayer; a pixel electrode which is formed above the barrier insulatinglayer and is electrically connected to the drain electrode of the TFT;an organic EL layer including an emitting layer formed on the pixelelectrode of each pixel; a metal electrode formed on the organic ELlayer; and a sealing layer which covers the metal electrode.
 21. Theflexible display according to claim 20, wherein a protective layer isformed on the gate electrode, the source and drain electrodes of the TFTand the pixel electrode are buried in the protective layer, and theorganic active layer is electrically connected to the source and drainelectrodes through via holes provided in required portions of the gateinsulating layer and the protective layer on the organic active layer.22. The flexible display according to claim 20, wherein the source anddrain electrodes of the TFT are formed so as to be extended upward frombetween the organic active layer and the gate insulating layer, aprotective layer is formed on the barrier insulating layer, and the TFTand the pixel electrode are buried in the protective layer.
 23. Theflexible display according to claim 20, wherein the pixel is set in ared pixel part, a green pixel part and a blue pixel part, and theemitting layer includes a red (R) emitting layer formed in the red pixelpart, a green (G) emitting layer formed in the green pixel part and ablue (B) emitting layer formed in the blue pixel part.
 24. The flexibledisplay according to claim 20, further comprising a color filter layer,wherein the emitting layer is a white emitting layer.
 25. The flexibledisplay according to claim 21, wherein respective upper surfaces of thesource electrode, the drain electrode and the pixel electrode are set tobe in plane with an upper surface of the protective layer.
 26. Theflexible display according to claim 21, wherein an upper surface of thegate electrode is set to be in plane with an upper surface of the gateinsulating layer.
 27. The flexible display according to claim 21,further comprising an organic insulating layer pattern which is formedbetween the barrier insulating layer and the gate insulating layer andhas an opening provided in a region including the via holes and the gateelectrode, wherein the organic active layer is formed from the via holesto the opening of the organic insulating layer pattern.
 28. The flexibledisplay according to claim 20, further comprising an organic insulatinglayer pattern having an opening provided on the pixel electrode, whereinthe organic EL layer is formed in the opening of the organic insulatinglayer pattern on the pixel electrode.
 29. The flexible display accordingto claim 22, wherein respective upper surfaces of the gate electrode andthe pixel electrode are set to be in plane with an upper surface of theprotective layer.
 30. The flexible display according to claim 20,wherein the TFTs include a switching TFT and a driving TFT connected tothe switching TFT, and the drain electrode of the driving TFT isconnected to the pixel electrode.
 31. The flexible display according toclaim 20, wherein the organic EL layer is composed of the emitting layerand at least one of a hole transport layer, which is formed between thepixel electrode and the emitting layer, and an electron transport layer,which is formed between the emitting layer and the metal electrode. 32.An active matrix flexible display in which a TFT is provided for eachpixel, comprising: a TFT substrate including a first plastic film, anadhesive layer formed on the first plastic film, a barrier insulatinglayer formed on the adhesive layer, a TFT which is formed on or abovethe barrier insulating layer and has a structure in which an organicactive layer, a gate insulating layer and a gate electrode are formedsequentially from the bottom and source and drain electrodes areelectrically connected to the organic active layer, a pixel electrodewhich is formed above the barrier insulating layer and is electricallyconnected to the drain electrode of the TFT, and a first alignment filmformed on the TFT and the pixel electrode; a counter substrate includinga second plastic film, a common electrode formed on the second plasticfilm, and a second alignment film formed on the common electrode; andliquid crystal sealed between the TFT substrate and the countersubstrate.
 33. The flexible display according to claim 32, wherein acolor filter layer is further provided in the TFT substrate.
 34. Amethod of manufacturing an active matrix flexible display in which a TFTis provided for each pixel, comprising the steps of: forming a peelablelayer on a temporary substrate; forming a TFT on the peelable layer, theTFT having a structure in which a gate electrode, a gate insulatinglayer and an organic active layer are formed sequentially from thebottom and source and drain electrodes are electrically connected to theorganic active layer, and forming a pixel electrode electricallyconnected to the drain electrode of the TFT; forming a barrierinsulating layer on or above the TFT; attaching a plastic film to abarrier insulating layer with an adhesive layer interposed therebetween;transferring and forming the barrier insulating layer, the TFT, thepixel electrode and the peelable layer in a state of being invertedupside down on the plastic film with the adhesive layer interposedtherebetween by peeling the temporary substrate from an interface withthe peelable layer; removing the peelable layer to partially expose theTFT and the pixel electrode; forming an organic EL layer, which includesan emitting layer, on the pixel electrode of each pixel; forming a metalelectrode on the organic EL layer; and forming a sealing layer whichcovers the metal electrode.
 35. The method of manufacturing a flexibledisplay, according to claim 34, wherein the step of forming the TFT andthe pixel electrode includes the steps of: forming source and drainelectrodes on the peelable layer, and forming a pixel electrodeelectrically connected to the drain electrode; forming a protectivelayer, which covers the source electrode, the drain electrode and thepixel electrode; forming a gate electrode in a portion on the protectivelayer on a space between the source and drain electrodes; forming a gateinsulating layer which covers the gate electrode; forming via holes inthe gate insulating layer and the protective layer, the via holes havingdepths that reach the source and drain electrodes; and forming anorganic active layer, which is electrically connected to the source anddrain electrodes through the via holes, on the gate insulating layer.36. The method of manufacturing a flexible display, according to claim34, wherein the step of forming the TFT and the pixel electrode includesthe steps of: forming a gate electrode on the peelable layer; forming agate insulating layer which covers an upper surface and sides of thegate electrode; forming source and drain electrodes on both ends of thegate insulating layer, and forming a pixel electrode, which is connectedto the drain electrode, on the peelable layer; and forming an organicactive layer on the gate insulating layer and the source and drainelectrodes.
 37. The method of manufacturing a flexible display,according to claim 34, wherein the organic active layer and the organicEL layer are formed by mask vapor deposition.
 38. The method ofmanufacturing a flexible display, according to claim 35, furthercomprising the step of forming an organic insulating layer pattern onthe gate insulating layer, the pattern having an opening provided in aregion including the via holes and the gate electrode, after the step offorming the via holes, wherein, in the step of forming the organicactive layer, the organic active layer is formed in the via holes and inthe opening of the organic insulating layer pattern, by using anyone ofan ink jet method and printing.
 39. The method of manufacturing aflexible display, according to claim 34, further comprising the stepsof: before the step of forming the pixel electrode, patterning a masklayer on the peelable layer; and forming an organic insulating layer onthe peelable layer and the mask layer, wherein the step of removing thepeelable layer includes formation of an organic insulating layerpattern, which has an opening provided on the pixel electrode, byetching the organic insulating layer by use of the mask layer as a maskafter the peelable layer is removed, and in the step of forming theorganic EL layer, the organic EL layer is formed in the opening of theorganic insulating layer pattern on the pixel electrode, by using anyoneof the ink jet method and printing.
 40. A method of manufacturing anactive matrix flexible display in which a TFT is provided for eachpixel, comprising the steps of: (a) preparing a TFT substrate by use ofa manufacturing method comprising the steps of: forming a peelable layeron a temporary substrate; forming a TFT on the peelable layer, the TFThaving a structure in which a gate electrode, a gate insulating layerand an organic active layer are formed sequentially from the bottom, andsource and drain electrodes are electrically connected to the organicactive layer, and forming a pixel electrode electrically connected tothe drain electrode of the TFT; forming a barrier insulating layer on orabove the TFT; attaching a plastic film to the barrier insulating layerwith an adhesive layer interposed therebetween; transferring and formingthe barrier insulating layer, the TFT, the pixel electrode and thepeelable layer in a state of being inverted upside down on the plasticfilm with the adhesive layer interposed therebetween by peeling thetemporary substrate from an interface with the peelable layer; removingthe peelable layer to partially expose the TFT and the pixel electrode;and forming an alignment film on the TFT and the pixel electrode; (b)attaching the TFT substrate to a counter substrate with a predeterminedspace therebetween, the counter substrate having a structure in which acommon electrode and an alignment film are formed on a second plasticfilm; and (c) sealing liquid crystal between the TFT substrate and thecounter substrate.